The structural characteristics of VOx films prepared by He-introduced reactive RF unbalanced magnetron sputtering

1996 ◽  
Vol 281-282 ◽  
pp. 436-440 ◽  
Author(s):  
H. Miyazaki ◽  
F. Utsuno ◽  
Y. Shigesato ◽  
I. Yasui
Keyword(s):  
Magnetron Sputtering ◽  
Structural Characteristics ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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