Growth dynamics of aluminum nitride and aluminum oxide thin films synthesized by ion-assisted deposition

Vacuum ◽

10.1016/0042-207x(89)90806-3 ◽

1989 ◽

Vol 39 (10) ◽

pp. 980

Keyword(s):

Aluminum Nitride ◽

Aluminum Oxide ◽

Growth Dynamics ◽

Oxide Thin Films

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Growth dynamics of aluminum nitride and aluminum oxide thin films synthesized by ion‐assisted deposition

Journal of Applied Physics ◽

10.1063/1.340068 ◽

1988 ◽

Vol 63 (3) ◽

pp. 760-769 ◽

Author(s):

R. P. Netterfield ◽

K.‐H. Müller ◽

D. R. McKenzie ◽

M. J. Goonan ◽

P. J. Martin

Keyword(s):

Aluminum Nitride ◽

Aluminum Oxide ◽

Growth Dynamics ◽

Oxide Thin Films

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Structure-property correlations in aluminum oxide thin films grown by reactive AC magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.01.033 ◽

2006 ◽

Vol 201 (3-4) ◽

pp. 1109-1116 ◽

Author(s):

Atul Khanna ◽

Deepak G. Bhat ◽

Adrian Harris ◽

Ben D. Beake

Keyword(s):

Magnetron Sputtering ◽

Aluminum Oxide ◽

Structure Property ◽

Oxide Thin Films ◽

Property Correlations

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Evaluation of structural and mechanical properties of aluminum oxide thin films deposited by a sol–gel process: Comparison of microwave to conventional anneal

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2006.06.013 ◽

2006 ◽

Vol 352 (38-39) ◽

pp. 4093-4100 ◽

Author(s):

A.R. Phani ◽

S. Santucci

Keyword(s):

Mechanical Properties ◽

Aluminum Oxide ◽

Sol Gel ◽

Oxide Thin Films ◽

Process Comparison ◽

Sol Gel Process

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Room-temperature molecular layer deposition of inorganic-organic hybrid aluminum oxide thin films for preventing spin relaxation of cell inner wall of optically pumped atomic magnetometer

Synthesis and Photonics of Nanoscale Materials XVIII ◽

10.1117/12.2579199 ◽

2021 ◽

Author(s):

Hiroshi Kumagai ◽

Shun Takeda ◽

Ryo Yoshimitsu ◽

Satoru Kobayashi ◽

Haruki Ishikawa

Keyword(s):

Aluminum Oxide ◽

Spin Relaxation ◽

Room Temperature ◽

Molecular Layer ◽

Oxide Thin Films ◽

Optically Pumped ◽

Molecular Layer Deposition ◽

Organic Hybrid ◽

Layer Deposition

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ChemInform Abstract: CHEMICAL VAPOR DEPOSITION OF ALUMINUM OXIDE THIN FILMS UNDER REDUCED PRESSURES

Chemischer Informationsdienst ◽

10.1002/chin.198530397 ◽

1985 ◽

Vol 16 (30) ◽

Author(s):

J. SARAIE ◽

J. KWON ◽

Y. YODOGAWA

Keyword(s):

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Reduced Pressures

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Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5093402 ◽

2019 ◽

Vol 37 (4) ◽

pp. 040901 ◽

Author(s):

Fatemeh S. M. Hashemi ◽

LiAo Cao ◽

Felix Mattelaer ◽

Timo Sajavaara ◽

J. Ruud van Ommen ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Aluminum Oxide ◽

Atomic Layer ◽

Oxide Thin Films ◽

Layer Deposition

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Microstructural and optical properties of aluminum oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1577132 ◽

2003 ◽

Vol 21 (4) ◽

pp. 906-910 ◽

Author(s):

Z. W. Zhao ◽

B. K. Tay ◽

S. P. Lau ◽

C. Y. Xiao

Keyword(s):

Optical Properties ◽

Aluminum Oxide ◽

Oxide Thin Films ◽

Filtered Cathodic Vacuum Arc

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Thermoluminescence properties of aluminum oxide thin films obtained by pulsed laser deposition

Radiation Measurements ◽

10.1016/s1350-4487(02)00062-8 ◽

2002 ◽

Vol 35 (4) ◽

pp. 355-359 ◽

Author(s):

J.E. Villarreal-Barajas ◽

L. Escobar-Alarcón ◽

P.R. González ◽

E. Camps ◽

M. Barboza-Flores

Keyword(s):

Aluminum Oxide ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Oxide Thin Films

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Permittivity enhancement of aluminum oxide thin films with the addition of silver nanoparticles

Applied Physics Letters ◽

10.1063/1.2425010 ◽

2006 ◽

Vol 89 (26) ◽

pp. 263511 ◽

Author(s):

R. Ravindran ◽

K. Gangopadhyay ◽

S. Gangopadhyay ◽

N. Mehta ◽

N. Biswas

Keyword(s):

Silver Nanoparticles ◽

Aluminum Oxide ◽

Oxide Thin Films

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Optical properties of aluminum oxide thin films and colloidal nanostructures

Thin Solid Films ◽

10.1016/j.tsf.2015.09.003 ◽

2015 ◽

Vol 592 ◽

pp. 81-87 ◽

Author(s):

E. Koushki ◽

S.H. Mousavi ◽

S.A. Jafari Mohammadi ◽

M.H. Majles Ara ◽

P.W. de Oliveira

Keyword(s):

Optical Properties ◽

Aluminum Oxide ◽

Oxide Thin Films

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