Growth dynamics of aluminum nitride and aluminum oxide thin films synthesized by ion‐assisted deposition
2006 ◽
Vol 201
(3-4)
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pp. 1109-1116
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2019 ◽
Vol 37
(4)
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pp. 040901
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2003 ◽
Vol 21
(4)
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pp. 906-910
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2002 ◽
Vol 35
(4)
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pp. 355-359
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