AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy

1996 ◽  
Vol 99 (2) ◽  
pp. 91-98 ◽  
Author(s):  
Timo Asikainen ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
Thomas Prohaska ◽  
Gernot Friedbacher ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Ito Thin Films

Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

1996 ◽  
Vol 6 (1) ◽  
pp. 27-31 ◽  
Author(s):  
Minna Nieminen ◽  
Lauri Niinistö ◽  
Eero Rauhala
Keyword(s):  
Thin Films ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽  
2006 ◽  
Vol 25 (6) ◽  
pp. 110-114 ◽  
Author(s):  
C LEE ◽  
J LIM ◽  
S PARK ◽  
H KIM
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
Nitrogen Doped ◽  
P Type

Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy

1994 ◽  
Vol 250 (1-2) ◽  
pp. 72-80 ◽  
Author(s):  
Mikko Ritala ◽  
Markku Leskelä ◽  
Lauri Niinistö ◽  
Thomas Prohaska ◽  
Gernot Friedbacher ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Atomic Layer Epitaxy

Monocrystalline thin films of ZnSe and ZnO grown by atomic layer epitaxy

Vacuum ◽  
2004 ◽  
Vol 74 (2) ◽  
pp. 269-272 ◽  
Author(s):  
K. Kopalko ◽  
M. Godlewski ◽  
E. Guziewicz ◽  
E. Łusakowska ◽  
W. Paszkowicz ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

Growth of ZnS thin films by liquid-phase atomic layer epitaxy (LPALE)

1994 ◽  
Vol 75 (1-4) ◽  
pp. 70-74 ◽  
Author(s):  
Seppo Lindroos ◽  
Tapio Kanniainen ◽  
Markku Leskelä
Keyword(s):  
Thin Films ◽  
Liquid Phase ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

Atomic Layer Epitaxy Growth of TiN Thin Films from Til4 and  NH 3

1998 ◽  
Vol 145 (8) ◽  
pp. 2914-2920 ◽  
Author(s):  
Mikko Ritala ◽  
Markku Leskelä ◽  
Eero Rauhala ◽  
Janne Jokinen
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Tin Thin Films
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