Photoluminescence Studies of ZnO thin films grown by atomic layer epitaxy

2004 ◽  
Vol 109 (3-4) ◽  
pp. 181-185 ◽  
Author(s):  
J LIM ◽  
K SHIN ◽  
H WOOKIM ◽  
C LEE
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
Photoluminescence Studies

Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽  
2006 ◽  
Vol 25 (6) ◽  
pp. 110-114 ◽  
Author(s):  
C LEE ◽  
J LIM ◽  
S PARK ◽  
H KIM
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
Nitrogen Doped ◽  
P Type

Growth of p-type ZnO thin films by using an atomic layer epitaxy technique and NH3 as a doping source

2007 ◽  
Vol 61 (11-12) ◽  
pp. 2495-2498 ◽  
Author(s):  
Chongmu Lee ◽  
Su Young Park ◽  
Jongmin Lim ◽  
Hyoun Woo Kim
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Zno Thin Films ◽  
P Type

scholarly journals Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

2021 ◽  
Vol 27 (S1) ◽  
pp. 2660-2662
Author(s):  
David Elam ◽  
Eduardo Ortega ◽  
Andrey Chabanov ◽  
Arturo Ponce
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Structural Defects ◽  
Zno Thin Films ◽  
Layer Deposition

Growth of gallium oxide thin films from gallium acetylacetonate by atomic layer epitaxy

1996 ◽  
Vol 6 (1) ◽  
pp. 27-31 ◽  
Author(s):  
Minna Nieminen ◽  
Lauri Niinistö ◽  
Eero Rauhala
Keyword(s):  
Thin Films ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Oxide Thin Films

Preparation of boron-doped ZnO thin films by photo-atomic layer deposition

2001 ◽  
Vol 65 (1-4) ◽  
pp. 125-132 ◽  
Author(s):  
Y. Yamamoto ◽  
K. Saito ◽  
K. Takahashi ◽  
M. Konagai
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Boron Doped ◽  
Layer Deposition ◽  
Doped Zno

Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy

1994 ◽  
Vol 250 (1-2) ◽  
pp. 72-80 ◽  
Author(s):  
Mikko Ritala ◽  
Markku Leskelä ◽  
Lauri Niinistö ◽  
Thomas Prohaska ◽  
Gernot Friedbacher ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Atomic Layer Epitaxy
Sign in / Sign up

Export Citation Format

Share Document