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Effects of Post-Annealing on the Electrical and Optical Properties of ZnO Thin Films Grown on Al2O3 Substrates by Atomic Layer Epitaxy
Materials Science Forum - Eco-Materials Processing and Design VIII
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10.4028/0-87849-431-6.729
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2007
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pp. 729-732
Author(s):
Chong Mu Lee
◽
Young Joon Cho
◽
Ho Jin Kim
◽
Wang Woo Lee
◽
Hyoun Woo Kim
◽
...
Keyword(s):
Thin Films
◽
Optical Properties
◽
Atomic Layer
◽
Atomic Layer Epitaxy
◽
Zno Thin Films
◽
Electrical And Optical Properties
◽
Post Annealing
Download Full-text
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References
RETRACTED: Dependence of the structural and optical properties of ZnO thin films on the substrate temperature in atomic layer deposition and post-annealing
Journal of Alloys and Compounds
◽
10.1016/j.jallcom.2006.02.102
◽
2008
◽
Vol 449
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◽
pp. 371-374
◽
Cited By ~ 9
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Jongmin Lim
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Atomic Layer Deposition
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Atomic Layer
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Structural And Optical Properties
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Post Annealing
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Layer Deposition
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Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
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2016
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Vol 9
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Optical Properties
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Atomic Layer Deposition
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Thermal Annealing
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Rapid Thermal Annealing
◽
Atomic Layer
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Zno Thin Films
◽
Electrical And Optical Properties
◽
Layer Deposition
◽
Doped Zno
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Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
Materials Science and Engineering B
◽
10.1016/j.mseb.2021.115401
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2021
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Vol 273
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pp. 115401
Author(s):
Chaeseon Hong
◽
Kyung-Mun Kang
◽
Minjae Kim
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Yue Wang
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Taehee Kim
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...
Keyword(s):
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Optical Properties
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Atomic Layer Deposition
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Atomic Layer
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Zno Thin Films
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Electrical And Optical Properties
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Layer Deposition
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Si Doped
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Influence of post-annealing on structural, electrical and optical properties of manganese oxide thin films grown by atomic layer deposition
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10.1016/j.tsf.2014.11.091
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Vol 574
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pp. 115-119
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Author(s):
Y.W. Li
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Keyword(s):
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Optical Properties
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Atomic Layer Deposition
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Atomic Layer
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Electrical And Optical Properties
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Post Annealing
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Layer Deposition
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Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol–gel method
Chinese Physics B
◽
10.1088/1674-1056/23/4/047805
◽
2014
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Vol 23
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◽
pp. 047805
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Meng-Meng Cao
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Effect of precursor medium on structural, electrical and optical properties of sprayed polycrystalline ZnO thin films
Materials Science and Engineering B
◽
10.1016/j.mseb.2010.06.012
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Vol 175
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pp. 29-35
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Electrical And Optical Properties
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Influence of Zn/O ratio on structural, electrical and optical properties of ZnO thin films fabricated by plasma-assisted molecular beam epitaxy
Journal of Alloys and Compounds
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10.1016/j.jallcom.2010.04.220
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2010
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Vol 503
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pp. 155-158
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Cited By ~ 24
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Bingye Zhang
◽
Bin Yao
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Chongxin Shan
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Molecular Beam Epitaxy
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Electrical and optical properties of nanostructured VOX thin films prepared by direct current magnetron reactive sputtering and post-annealing in oxygen
Thin Solid Films
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10.1016/j.tsf.2011.03.003
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Vol 519
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Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy
Rare Metals
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10.1016/s1001-0521(07)60055-2
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P Type
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Study of substrate temperature and copper doping effects on structural, electrical and optical properties of Cu-doped and undoped ZnO thin films
Journal of Materials Science Materials in Electronics
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10.1007/s10854-016-4771-3
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2016
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Vol 27
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pp. 7822-7828
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Cited By ~ 7
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Zno Thin Films
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Doping Effects
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