In situ quadrupole mass spectroscopy studies of water and solvent coordination to copper(II) β-diketonate precursors: implications for the chemical vapor deposition of copper
1995 ◽
Vol 41
(3)
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pp. 173-181
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2004 ◽
Vol 22
(3)
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pp. 1277
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1995 ◽
Vol 53
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pp. 256-257
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1993 ◽
Vol 140
(12)
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pp. 3588-3590
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2017 ◽
Vol 5
(16)
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pp. 4068-4074
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1996 ◽
Vol 14
(3)
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pp. 1687
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