A new concept for physical vapor deposition coating combining the methods of arc evaporation and unbalanced-magnetron sputtering

1991 ◽  
Vol 49 (1-3) ◽  
pp. 161-167 ◽  
Author(s):  
W.-D. Münz ◽  
F.J.M. Hauzer ◽  
D. Schulze ◽  
B. Buil
Keyword(s):  
Magnetron Sputtering ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Arc Evaporation

Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

MRS Bulletin ◽  
2003 ◽  
Vol 28 (3) ◽  
pp. 173-179 ◽  
Author(s):  
W.-D. Münz
Keyword(s):  
Magnetron Sputtering ◽  
Physical Vapor Deposition ◽  
Large Scale ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Gas Atmosphere ◽  
Plastic Hardness ◽  
Corrosion Resistant Coatings ◽  
Cathodic Arc

AbstractNanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
Sign in / Sign up

Export Citation Format

Share Document