Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering

2007 ◽  
Vol 51 (3) ◽  
pp. 1129 ◽  
Author(s):  
Yun Hye Cho ◽  
Won Seok Choi ◽  
Yong Seob Park ◽  
Hyung Jun Cho ◽  
Byungyou Hong
Keyword(s):  
Chemical Vapor Deposition ◽  
Magnetron Sputtering ◽  
Double Layer ◽  
Tribological Properties ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Influence of CrB2 target current on the microstructure, mechanical and tribological properties of Cr–B–C–N coatings in water

RSC Advances ◽  
2016 ◽  
Vol 6 (53) ◽  
pp. 47698-47711 ◽  
Author(s):  
Qiang Ma ◽  
Fei Zhou ◽  
Qianzhi Wang ◽  
Zhiwei Wu ◽  
Kangmin Chen ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Stainless Steels ◽  
Closed Field ◽  
Mechanical And Tribological Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Cr–B–C–N coatings with different boron contents (24.6–27.2 at%) were deposited on Si(100) wafers and 316L stainless steels by using closed-field unbalanced magnetron sputtering via adjusting the CrB2 target current.

Sign in / Sign up

Export Citation Format

Share Document