Large-area YBCO thin film deposition using linear hollow cathode discharge sputtering

1996 ◽  
Vol 262 (1-2) ◽  
pp. 89-97 ◽  
Author(s):  
Th. Schurig ◽  
S. Menkel ◽  
Z. Quan ◽  
J. Beyer ◽  
B. Güttler ◽  
...  
Keyword(s):  
Thin Film ◽  
Hollow Cathode ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Hollow Cathode Discharge ◽  
Ybco Thin Film ◽  
Large Area

Hollow cathode discharge sputtering device for uniform large area thin film deposition

1991 ◽  
Vol 9 (4) ◽  
pp. 2374-2377 ◽  
Author(s):  
H. Koch ◽  
L. J. Friedrich ◽  
V. Hinkel ◽  
F. Ludwig ◽  
B. Politt ◽  
...  
Keyword(s):  
Thin Film ◽  
Hollow Cathode ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Hollow Cathode Discharge ◽  
Large Area

Multi-target reactive sputtering—A promising technology for large-area Pb(Zr,Ti)O3 thin film deposition

2007 ◽  
Vol 27 (13-15) ◽  
pp. 3789-3792 ◽  
Author(s):  
G. Suchaneck ◽  
W.-M. Lin ◽  
V.S. Vidyarthi ◽  
G. Gerlach ◽  
J. Hartung
Keyword(s):  
Thin Film ◽  
Reactive Sputtering ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Large Area ◽  
Promising Technology

Multiscale structured low-temperature solid oxide fuel cells with 13 W power at 500 °C

2020 ◽  
Vol 13 (10) ◽  
pp. 3459-3468 ◽  
Author(s):  
Sung Soo Shin ◽  
Jeong Hun Kim ◽  
Kyung Taek Bae ◽  
Kang-Taek Lee ◽  
Sang Moon Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Fuel Cell ◽  
Low Temperature ◽  
Solid Oxide Fuel Cells ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Solid Oxide ◽  
Oxide Fuel ◽  
Large Area ◽  
Deposition Processes

A multiscale architectured solid oxide fuel cell is demonstrated by applying a large-area ceramic micropatterning and thin-film deposition processes.

scholarly journals Assembly of metallic nanoparticle arrays on glass via nanoimprinting and thin-film dewetting

2017 ◽  
Vol 8 ◽  
pp. 1049-1055 ◽  
Author(s):  
Sun-Kyu Lee ◽  
Sori Hwang ◽  
Yoon-Kee Kim ◽  
Yong-Jun Oh
Keyword(s):  
Thin Film ◽  
Elevated Temperatures ◽  
Sol Gel ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Noble Metal Nanoparticles ◽  
Nanoparticle Arrays ◽  
Metallic Nanoparticle ◽  
Large Area ◽  
Pdms Stamp

We propose a nanofabrication process to generate large-area arrays of noble metal nanoparticles on glass substrates via nanoimprinting and dewetting of metallic thin films. Glass templates were made via pattern transfer from a topographic Si mold to an inorganically cross-linked sol–gel (IGSG) resist on glass using a two-layer polydimethylsiloxane (PDMS) stamp followed by annealing, which turned the imprinted resist into pure silica. The transparent, topographic glass successfully templated the assembly of Au and Ag nanoparticle arrays via thin-film deposition and dewetting at elevated temperatures. The microstructural and mechanical characteristics that developed during the processes were discussed. The results are promising for low-cost mass fabrication of devices for several photonic applications.

Large-area selective thin film deposition by bias sputtering

1994 ◽  
Vol 241 (1-2) ◽  
pp. 1-8 ◽  
Author(s):  
S. Berg ◽  
I.V. Katardjiev ◽  
C. Nender ◽  
P. Carlsson
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Large Area
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