Hollow cathode discharge sputtering device for uniform large area thin film deposition
1991 ◽
Vol 9
(4)
◽
pp. 2374-2377
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Keyword(s):
1996 ◽
Vol 262
(1-2)
◽
pp. 89-97
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 62
(14)
◽
pp. 1457-1463
Keyword(s):
2007 ◽
Vol 27
(13-15)
◽
pp. 3789-3792
◽
Keyword(s):
2020 ◽
Vol 13
(10)
◽
pp. 3459-3468
◽
Keyword(s):
2017 ◽
Vol 8
◽
pp. 1049-1055
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Keyword(s):
Keyword(s):