Cathodic arc deposition of diamond-like carbon: effect of bias voltage and deposition angle

1991 ◽  
Vol 140 ◽  
pp. 780-783 ◽  
Author(s):  
B. Rother ◽  
J. Siegel ◽  
I. Mühling ◽  
H. Fritzsch ◽  
K. Breuer
Keyword(s):  
Bias Voltage ◽  
Diamond Like Carbon ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition ◽  
Deposition Angle

scholarly journals Effect of Fluorine Incorporation on DLC Films Deposited by Pulsed Cathodic Arc Deposition on Nitrile Butadiene Rubber and Polyurethane Rubber Substrates

Coatings ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 878
Author(s):  
Lijie Zhang ◽  
Xuemei Zong ◽  
Fei Guo ◽  
Bing He ◽  
Xiaoming Yuan
Keyword(s):  
Coefficient Of Friction ◽  
Diamond Like Carbon ◽  
Butadiene Rubber ◽  
Nitrile Butadiene Rubber ◽  
Cathodic Arc Deposition ◽  
Film Coefficient ◽  
Cathodic Arc ◽  
Arc Deposition

Diamond-like carbon (DLC) and fluorinated diamond-like carbon (F-DLC) films were deposited via pulsed cathodic arc deposition on pretreated nitrile butadiene rubber (NBR) and polyurethane (PU) rubber substrates. Both DLC and F-DLC films showed a more than 50% decrease in coefficients of friction compared to uncoated NBR and PU rubber substrates. The incorporation of fluorine was found to have little influence on the film coefficient of friction. However, a decrease in film wettability was overserved in the F-DLC films compared to the DLC films.

Microstructure of diamond-like carbon films prepared by cathodic arc deposition

2002 ◽  
Vol 11 (7) ◽  
pp. 1436-1440 ◽  
Author(s):  
Ayako Kimura ◽  
Yasushi Azuma ◽  
Tetsuya Suzuki ◽  
Tomohiro Saito ◽  
Yuichi Ikuhara
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition

scholarly journals Mechanical Properties of Amorphous Hard Carbon Films Prepared by Cathodic ARC Deposition

1995 ◽  
Vol 383 ◽  
Author(s):  
Simone Anders ◽  
André Anders ◽  
Joel W. Ager ◽  
Zhi Wang ◽  
George M. Pharr ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Deposition Process ◽  
Carbon Films ◽  
Carbon Ions ◽  
Hard Carbon ◽  
Cathodic Arc Deposition ◽  
Transmission Electron ◽  
As Stress ◽  
Cathodic Arc ◽  
Arc Deposition

ABSTRACTCathodic arc deposition combined with macroparticle filtering of the plasma is an efficient and versatile method for the deposition of amorphous hard carbon films of high quality. The film properties can be tailored over a broad range by varying the energy of the carbon ions incident upon the substrate and upon the growing film by applying a pulsed bias technique. By varying the bias voltage during the deposition process specific properties of the interface, bulk film and top surface layer can be obtained. We report on nanoindentation and transmission electron microscopy studies as well as stress measurements of cathodic-arc amorphous hard carbon films deposited with varied bias voltage. The investigations were performed on multilayers consisting of alternating hard and soft amorphous carbon.

Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition

2013 ◽  
Vol 224 ◽  
pp. 77-81 ◽  
Author(s):  
F. Lomello ◽  
F. Sanchette ◽  
F. Schuster ◽  
M. Tabarant ◽  
A. Billard
Keyword(s):  
Bias Voltage ◽  
Cathodic Arc Deposition ◽  
Cathodic Arc ◽  
Arc Deposition
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