Characterization of electron cyclotron resonance process plasma and film deposition

Materials Science and Engineering A ◽

10.1016/0921-5093(91)90632-w ◽

1991 ◽

Vol 139 ◽

pp. 294-301 ◽

Author(s):

Shoji Miyake ◽

Wei Chen

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Resonance Process

Download Full-text

Etch characterization of an electron cyclotron resonance process reactor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577276 ◽

1991 ◽

Vol 9 (4) ◽

pp. 2356-2363 ◽

Author(s):

Guadalupe Fortuño‐Wiltshire

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Resonance Process

Download Full-text

Effect of decamethylcyclopentasiloxane and trifluoromethane electron cyclotron resonance plasmas on F–SiCOH low dielectric constant film deposition

Journal of Applied Physics ◽

10.1063/1.3159880 ◽

2009 ◽

Vol 106 (1) ◽

pp. 013302 ◽

Author(s):

Chao Ye ◽

Haiyan Zhang ◽

Zhaoyuan Ning

Keyword(s):

Dielectric Constant ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Film Deposition ◽

Low Dielectric Constant ◽

Download Full-text

Chemical and electrical characterization of AlGaAs/GaAs heterojunction bipolar transistors treated by electron cyclotron resonance plasmas

Applied Physics Letters ◽

10.1063/1.107122 ◽

1992 ◽

Vol 60 (16) ◽

pp. 1996-1998 ◽

Author(s):

P. W. Li ◽

Q. Wang ◽

E. S. Yang

Keyword(s):

Heterojunction Bipolar Transistors ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electrical Characterization ◽

Bipolar Transistors ◽

Electron Cyclotron

Download Full-text

Electron cyclotron resonance plasma source for conductive film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579309 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1281-1286 ◽

Author(s):

Toshiro Ono ◽

Hiroshi Nishimura ◽

Masaru Shimada ◽

Seitaro Matsuo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Conductive Film ◽

Resonance Plasma

Download Full-text

Etch characterization of a broad‐beam electron cyclotron resonance ion source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576610 ◽

1990 ◽

Vol 8 (3) ◽

pp. 2945-2949 ◽

Author(s):

E. Ghanbari ◽

T. Nguyen ◽

S. Bui ◽

E. Ostan

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Beam Electron ◽

Download Full-text

Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

Download Full-text

Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

Download Full-text

Spectroscopic characterization of the plasma generated during the deposition of AlxGa1−xN films by pulsed laser co-ablation of Al and GaAs targets in electron cyclotron resonance nitrogen plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/48/24/245203 ◽

2015 ◽

Vol 48 (24) ◽

pp. 245203 ◽

Author(s):

Peipei Liang ◽

Hua Cai ◽

Yanli Li ◽

Xu Yang ◽

Qinghu You ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Pulsed Laser ◽

Spectroscopic Characterization ◽

Nitrogen Plasma ◽

Electron Cyclotron

Download Full-text

Characterization of Ar/Cu electron‐cyclotron‐resonance plasmas using optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.363177 ◽

1996 ◽

Vol 80 (5) ◽

pp. 2605-2613 ◽

Author(s):

R. L. Rhoades ◽

S. M. Gorbatkin

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Electron Cyclotron

Download Full-text

Characterization of electronic and optical properties of device quality a‐Si:H and a‐(Si,Ge):H grown by remote plasma electron cyclotron resonance deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577391 ◽

1991 ◽

Vol 9 (3) ◽

pp. 474-479 ◽

Author(s):

R. D. Knox ◽

V. L. Dalal ◽

O. A. Popov

Keyword(s):

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Electron ◽

Electron Cyclotron ◽

Remote Plasma ◽

Electronic And Optical Properties

Download Full-text