Characterization of electronic and optical properties of device quality a‐Si:H and a‐(Si,Ge):H grown by remote plasma electron cyclotron resonance deposition
1991 ◽
Vol 9
(3)
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pp. 474-479
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1993 ◽
Vol 11
(6)
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pp. 2288
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1997 ◽
Vol 105
(1224)
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pp. 687-689
1990 ◽
Vol 8
(3)
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pp. 2945-2949
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Keyword(s):
2015 ◽
Vol 48
(24)
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pp. 245203
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