Micro wire electrical discharge machining (Micro-WEDM) is one key micro-processing technology for intricate micro parts. The surface texture is different with a single mechanical cutting surface and conventional spark-erosion formation machined surface. Assessment of the existing surface texture roughness parameters in terms of accuracy, or in the characterization of fine sense, can not meet the Micro-WEDM surface texture characterization needs. Through the analyses of surface autocorrelation function, structural shape ration, steepest attenuation autocorrelation function and surface texture direction, explicit the precise meaning of surface texture parameter characterization, make it really reflect the actual condition of Micro wire electrical discharge machining surface, modify Characterization Parameter algorithm, simplify the calculation process, make the results more accurate and more intuitive. Keywords: Micro wire electrical discharge machining; autocorrelation function; surface texture