Plasma-Enhanced Chemical Vapor Deposition of Transition Metals and Transition Metal Silicides* *Portions of this article are adapted from Solid State Technology26 (3), p. 125 (1983). Reprinted with permission from Solid State Technology, Technical Publishing, a company of Dun and Bradstreet.

1984 ◽  
pp. 55-68
Author(s):  
DENNIS W. HESS
Keyword(s):  
Chemical Vapor Deposition ◽  
Solid State ◽  
Transition Metal ◽  
Transition Metals ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Metal Silicides ◽  
Dun And Bradstreet ◽  
A Company ◽  
State Technology

Routes to 3D conformal solid-state dielectric polymers: electrodeposition versus initiated chemical vapor deposition

2015 ◽  
Vol 2 (5) ◽  
pp. 502-508 ◽  
Author(s):  
Megan B. Sassin ◽  
Jeffrey W. Long ◽  
Jean Marie Wallace ◽  
Debra R. Rolison
Keyword(s):  
Chemical Vapor Deposition ◽  
Solid State ◽  
Chemical Vapour Deposition ◽  
Vapor Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Chemical Vapor ◽  
Initiated Chemical Vapor Deposition ◽  
Carbon Coated ◽  
Conductive Substrates

We show that two distinct methods, electropolymerization and initiated chemical vapour deposition (iCVD), can be adapted to generate ultrathin polymers (30–50 nm thick) at three dimensionally (3D) porous conductive substrates comprising ∼300 μm-thick carbon-coated silica fiber paper (C@SiO2).

Chemical Vapor Deposition of Binary Metal Germanides

1990 ◽  
Vol 187 ◽  
Author(s):  
M.J. Hampden-Smith ◽  
J. Garvey ◽  
D. Lei ◽  
J.C. Huffman
Keyword(s):  
Thermal Decomposition ◽  
Grain Size ◽  
Chemical Vapor Deposition ◽  
Transition Metal ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Solution Model ◽  
Binary Metal ◽  
Decomposition Experiments

AbstractA series of transition metal substituted germacyclopent-3-ene compounds containing transition metal-germanium bonds have been prepared with supporting ligands which are designed to be easily removed either thermally or photochemically. In solution, model thermal decomposition experiments show that either the geramanium or the transition metal substituents may be removed, depending on the nature of the metal. Preliminary hot-wall CVD experiments using manganese and cobalt derivatives result in films with small grain size.

scholarly journals Sequential bottom-up and top-down processing for the synthesis of transition metal dichalcogenide nanosheets: the case of rhenium disulfide (ReS2)

2016 ◽  
Vol 52 (50) ◽  
pp. 7878-7881 ◽  
Author(s):  
Naktal Al-Dulaimi ◽  
Edward A. Lewis ◽  
David J. Lewis ◽  
Simon K. Howell ◽  
Sarah J. Haigh ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Liquid Phase ◽  
Transition Metal ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Transition Metal Dichalcogenide ◽  
Top Down ◽  
Bottom Up ◽  
Liquid Phase Exfoliation ◽  
Methyl Pyrrolidone

Bottom-up (aerosol-assisted chemical vapor deposition, AACVD) and top-down (liquid phase exfoliation, LPE) processing methodologies are used in tandem to produce colloids of few-layer thick rhenium disulfide (ReS2) in N-methyl pyrrolidone.

Flexible all solid-state supercapacitors based on chemical vapor deposition derived graphene fibers

2013 ◽  
Vol 15 (41) ◽  
pp. 17752 ◽  
Author(s):  
Xinming Li ◽  
Tianshuo Zhao ◽  
Qiao Chen ◽  
Peixu Li ◽  
Kunlin Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Solid State ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Graphene Fibers
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