Design of MEMS microphone protective membranes for continuous outdoor applications

2021 ◽  
Vol 183 ◽  
pp. 108304
Author(s):  
T. Wenzel ◽  
R. Rettig
Keyword(s):  
Author(s):  
J. Citakovic ◽  
P.F. Hovesten ◽  
G. Rocca ◽  
A. van Halteren ◽  
P. Rombach ◽  
...  
Keyword(s):  

2008 ◽  
Vol 309 (1-2) ◽  
pp. 276-292 ◽  
Author(s):  
Jian Liu ◽  
David T. Martin ◽  
Karthik Kadirvel ◽  
Toshikazu Nishida ◽  
Louis Cattafesta ◽  
...  

Author(s):  
Ganesh Iyer ◽  
Wei Li ◽  
Lavanya Gopalakrishnan

Microphone is a critical component for seamless communication converting an acoustic signal (vocal) to an electrical signal. Traditionally Electrets Condenser Microphones (ECM) have been the primary proponent of audio component in many consumer products. With functionally rich consumer devices (example smart phones, etc) there is a growing trend to look at components with higher functionality but a smaller form factor. Microelectronic Mechanical Systems (MEMS) microphone is seen as a possible replacement to ECM due to its significant reduction in form fit with additional functionality. The paper is an effort to illustrate steps that can be considered while designing MEMS microphone in a system. This includes Design considerations, Reliability tests, Manufacturing challenges and Readiness to ensure higher yield during the final assembly. Manufacturing issues (Top 5) and guideline presented in the paper are not just to increase the assembly yield (system level), but also to increase an awareness upfront to the design phase to help create a robust system/product.


Author(s):  
Y. Zhang ◽  
R. Bauer ◽  
W.M. Whitmer ◽  
W.O. Brimijoin ◽  
D. Uttamchandani ◽  
...  

Author(s):  
Kazuhiro Onishi ◽  
Osamu Terashima ◽  
Yasuhiko Sakai ◽  
Kouji Nagata

A new static pressure probe was developed to improve the space resolution and the measurement accuracy of the combined probe for the simultaneous measurement of the static pressure and the velocity in turbulent flows. The external diameter of the static pressure tube is 0.3 mm and its internal diameter is 0.2 mm. There are 8 static pressure holes on the wall of the static pressure tube and their diameters are 0.1 mm. The MEMS microphone is used as the pressure sensor and embedded inside the flare of the static pressure tube. The diameter of the MEMS microphone is 2.54 mm and has the wide range flat frequency response. The measurement results by the new static pressure probe in the two-dimensional turbulent jet show that the measurement accuracy of the static pressure probe is sufficient and the seven-thirds power law is clearly observed in the power spectra of the fluctuating pressure measured at the position of a half width of the mean velocity distribution in the cross-streamwise direction apart from the jet center line. In addition, the yaw angle characteristics of this new pressure probe shows that the measurement accuracy of the static pressure has less dependency on the yaw angle of the probe to the flow direction than the one of the previous static pressure tube (its external diameter is 0.5 mm). From these results, it is found that the new static pressure probe is effective for the measurement of static pressure in turbulent flows and useful to improve the space resolution and the measurement accuracy of the combined probe for the simultaneous measurement of the velocity and the static pressure. By using this static pressure tube, the space resolution of the combined probe is reduced approximately 40%. Further, by combing two X-type hot-wire probes with the new pressure probe, the simultaneous measurement of three velocity components and static pressure is realized.


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