The effect of post-annealing on surface acoustic wave devices based on ZnO thin films prepared by magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2010.12.053 ◽

2011 ◽

Vol 257 (9) ◽

pp. 4339-4343 ◽

Author(s):

Duy-Thach Phan ◽

Gwiy-Sang Chung

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Post Annealing ◽

Acoustic Wave Devices

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Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices

Thin Solid Films ◽

10.1016/j.tsf.2008.12.008 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3378-3381 ◽

Author(s):

Wen-Ching Shih ◽

Hong-Yi Su ◽

Mu-Shiang Wu

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

High Frequency ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

Acoustic Wave Devices

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Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2993176 ◽

2008 ◽

Vol 26 (6) ◽

pp. 1848-1851 ◽

Author(s):

Qi Jie Wang ◽

Christian Pflügl ◽

William F. Andress ◽

Donhee Ham ◽

Federico Capasso ◽

...

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Surface Acoustic Wave ◽

Wave Generation ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Acoustic Wave Generation ◽

Semiconductor Substrates

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The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.050 ◽

2011 ◽

Vol 257 (20) ◽

pp. 8696-8701 ◽

Author(s):

Duy-Thach Phan ◽

Gwiy-Sang Chung

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Surface Acoustic Wave ◽

Wave Characteristics ◽

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Study of ZNO thin films grown by PLD on [100] Si for surface acoustic wave devices

International Semiconductor Device Research Symposium, 2003 ◽

10.1109/isdrs.2003.1272021 ◽

2004 ◽

Author(s):

A.N. Chryssis ◽

S. Krishnamoorthy ◽

A.A. Iliadis ◽

U. Lee

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Acoustic Wave Devices

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Comprehensive characterization of ZnO thin films for surface acoustic wave applications

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-019-01834-8 ◽

2019 ◽

Vol 30 (15) ◽

pp. 14621-14630

Author(s):

Burak Yildirim ◽

Onur Tigli

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

Comprehensive Characterization

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Characteristics of AlN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Band Surface Acoustic Wave Devices

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.2957 ◽

1994 ◽

Vol 33 (Part 1, No. 5B) ◽

pp. 2957-2961 ◽

Author(s):

Hiroshi Okano ◽

Naoki Tanaka ◽

Yasuhiro Hirao ◽

Yasumi Kobayashi ◽

Kenichi Shibata ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Acoustic Wave Devices ◽

Dual Ion Beam Sputtering

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Preparation of Pd Thin Films and their Application in Surface Acoustic Wave Devices for Sensing Hydrogen

ECS Meeting Abstracts ◽

10.1149/ma2012-01/46/1655 ◽

2012 ◽

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Acoustic Wave Devices

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Surface Acoustic Wave Based on ZnO Thin Films Grown by RF-MBE

Chinese Journal of Luminescence ◽

10.3788/fgxb20123303.0328 ◽

2012 ◽

Vol 33 (3) ◽

pp. 328-333

Author(s):

刘凤娟 LIU Feng-juan ◽

胡佐富 HU Zuo-fu ◽

李振军 LI Zhen-jun ◽

张希清 ZHANG Xi-qing

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

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Fabrication and characteristics of a surface acoustic wave UV sensor based on ZnO thin films grown on a polycrystalline 3C–SiC buffer layer

Current Applied Physics ◽

10.1016/j.cap.2011.08.013 ◽

2012 ◽

Vol 12 (2) ◽

pp. 521-524 ◽

Author(s):

Duy-Thach Phan ◽

Gwiy-Sang Chung

Keyword(s):

Acoustic Wave ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

Zno Thin Films ◽

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Characterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices

10.22215/etd/2004-05798 ◽

2004 ◽

Author(s):

Akhtar Mirfazli

Keyword(s):

Low Temperature ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Acoustic Wave Devices

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