Surface Acoustic Wave Based on ZnO Thin Films Grown by RF-MBE

2012 ◽  
Vol 33 (3) ◽  
pp. 328-333
Author(s):  
刘凤娟 LIU Feng-juan ◽  
胡佐富 HU Zuo-fu ◽  
李振军 LI Zhen-jun ◽  
张希清 ZHANG Xi-qing
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Films

Nanocrystalline ZnO Film Layer on Silicon and its Application to Surface Acoustic Wave-Based Streaming

2008 ◽  
Vol 8 (9) ◽  
pp. 4626-4629 ◽  
Author(s):  
Dae-Sik Lee ◽  
Jikui Luo ◽  
Yongqing Fu ◽  
William I Milne ◽  
Nae-Man Park ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Hydrophobic Surface ◽  
Zno Thin Films ◽  
Average Roughness ◽  
Axis Orientation ◽  
Film Layer ◽  
20 Nm

A surface acoustic wave (SAW) device consisting of 1∼6 μm-thick ZnO thin films deposited on Si wafer was designed, fabricated, and characterized in this study. Photolithographic protocols for interdigitated transducers (IDTs) and surface modification using fluoroalkylsilane are employed with the aim of droplet-based microfluidic actuations in bio-microsystems. A ZnO thin film was grown on a 4′ silicon wafer with c-axis orientation, an average roughness of 11.6 nm, and a small grain size of 20 nm. It was found that the resonant frequencies (Rayleigh and Sezawa modes) of SAW devices move to a lower frequency range as the thickness of the ZnO thin films increases. Through the silane surface modification, a hydrophobic surface with a contact angle of 114° was obtained. Finally, liquid streaming by acoustic wave was demonstrated by observing the actuation of SiO2 microparticles in a microfluidic drop.

ZnO thin films for applications in surface acoustic wave actuators

2016 ◽  
Author(s):  
A. W. Nowek ◽  
R. Stankiewicz ◽  
M. Baran ◽  
I. Zalewska ◽  
E. Brzozowski
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Films

AlN, ZnO thin films and AlN/ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave applications

2015 ◽  
Vol 212 (4) ◽  
pp. 817-825 ◽  
Author(s):  
P. Dutheil ◽  
J.-C. Orlianges ◽  
A. Crunteanu ◽  
A. Catherinot ◽  
C. Champeaux
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Films ◽  
Multilayer Structures
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