Study of ZNO thin films grown by PLD on [100] Si for surface acoustic wave devices

2004 ◽  
Author(s):  
A.N. Chryssis ◽  
S. Krishnamoorthy ◽  
A.A. Iliadis ◽  
U. Lee
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Films ◽  
Acoustic Wave Devices

Surface Acoustic Wave Based on ZnO Thin Films Grown by RF-MBE

2012 ◽  
Vol 33 (3) ◽  
pp. 328-333
Author(s):  
刘凤娟 LIU Feng-juan ◽  
胡佐富 HU Zuo-fu ◽  
李振军 LI Zhen-jun ◽  
张希清 ZHANG Xi-qing
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Thin Films

Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

1994 ◽  
Vol 64 (2) ◽  
pp. 166-168 ◽  
Author(s):  
Hiroshi Okano ◽  
Naoki Tanaka ◽  
Yusuke Takahashi ◽  
Toshiharu Tanaka ◽  
Kenichi Shibata ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Reactive Sputtering ◽  
Acoustic Wave Devices
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