The influence of atomic layer deposition process temperature on ZnO thin film structure

Bias temperature stress stabilities of thin-film transistors (TFTs) using In–Ga–Zn–O (IGZO) channels prepared by the atomic layer deposition process were investigated with varying channel thicknesses (10 and 6 nm).

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All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5119937 ◽

2019 ◽

Vol 37 (6) ◽

pp. 060910 ◽

Cited By ~ 1

Author(s):

Jeong-Mu Lee ◽

Hwan-Jae Lee ◽

Jae-Eun Pi ◽

Jong-Heon Yang ◽

Jeong Hun Lee ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Deposition Process ◽

Oxide Thin Film ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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Control of thin film structure by reactant pressure in atomic layer deposition of TiO2

Journal of Crystal Growth ◽

10.1016/s0022-0248(96)00423-x ◽

1996 ◽

Vol 169 (3) ◽

pp. 496-502 ◽

Cited By ~ 58

Author(s):

Jaan Aarik ◽

Aleks Aidla ◽

Väino Sammelselg ◽

Hele Siimon ◽

Teet Uustare

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Film Structure ◽

Thin Film Structure ◽

Layer Deposition

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On the Mechanisms of SiO2 Thin-Film Growth by the Full Atomic Layer Deposition Process Using Bis(t-butylamino)silane on the Hydroxylated SiO2(001) Surface

The Journal of Physical Chemistry C ◽

10.1021/jp2094802 ◽

2011 ◽

Vol 116 (1) ◽

pp. 947-952 ◽

Cited By ~ 33

Author(s):

Bo Han ◽

Qingfan Zhang ◽

Jinping Wu ◽

Bing Han ◽

Eugene J. Karwacki ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Growth ◽

Atomic Layer ◽

Deposition Process ◽

Thin Film Growth ◽

Atomic Layer Deposition Process ◽

Sio2 Thin Film ◽

Layer Deposition

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Paper No S12.4: Effect of Plasma Power of Plasma Enhanced Atomic Layer Deposition Process for Gate Insulator Deposition in Top-Gate Thin-Film Transistors

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.10531 ◽

2015 ◽

Vol 46 (S1) ◽

pp. 54-54 ◽

Cited By ~ 1

Author(s):

J. B. Ko ◽

H. I. Yeom ◽

C.-S. Hwang ◽

S. Cho ◽

S.-H. K. Park

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

Atomic Layer ◽

Deposition Process ◽

Gate Insulator ◽

Plasma Power ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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A study of MgF2 thin film growth in the atomic layer deposition process by multi-scale simulations

Computational Materials Science ◽

10.1016/j.commatsci.2021.110327 ◽

2021 ◽

Vol 191 ◽

pp. 110327

Author(s):

Sung Hoon Lee ◽

HyunHang Park ◽

Hoon Kim ◽

Ming-Huang Huang

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Film Growth ◽

Atomic Layer ◽

Deposition Process ◽

Thin Film Growth ◽

Atomic Layer Deposition Process ◽

Multi Scale ◽

Layer Deposition

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Atomic layer deposition of rutile and TiO2-II from TiCl4 and O3 on sapphire: Influence of substrate orientation on thin film structure

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2015.07.029 ◽

2015 ◽

Vol 428 ◽

pp. 86-92 ◽

Cited By ~ 5

Author(s):

Kristel Möldre ◽

Lauri Aarik ◽

Hugo Mändar ◽

Ahti Niilisk ◽

Raul Rammula ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Film Structure ◽

Substrate Orientation ◽

Thin Film Structure ◽

Layer Deposition ◽

Influence Of Substrate

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Improving atomic layer deposition process through reactor scale simulation

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2014.07.079 ◽

2014 ◽

Vol 78 ◽

pp. 1243-1253 ◽

Cited By ~ 14

Author(s):

Mohammad Reza Shaeri ◽

Tien-Chien Jen ◽

Chris Yingchun Yuan

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

ACS Omega ◽

10.1021/acsomega.8b02314 ◽

2018 ◽

Vol 3 (11) ◽

pp. 14567-14574 ◽

Cited By ~ 2

Author(s):

Mantu K. Hudait ◽

Michael B. Clavel ◽

Jheng-Sin Liu ◽

Shuvodip Bhattacharya

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

Atomic Layer Deposition Process ◽

Layer Deposition

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