In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

Optical in situ monitoring of plasma-enhanced atomic layer deposition process

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.06jf05 ◽

2018 ◽

Vol 57 (6S2) ◽

pp. 06JF05 ◽

Cited By ~ 2

Author(s):

Muhammad Zeeshan Arshad ◽

Kyung Jae Jo ◽

Hyun Gi Kim ◽

Sang Jeen Hong

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

In Situ Monitoring ◽

In Situ Reaction Mechanism Studies on Lithium Hexadimethyldisilazide and Ozone Atomic Layer Deposition Process for Lithium Silicate

The Journal of Physical Chemistry C ◽

10.1021/jp312309g ◽

2013 ◽

Vol 117 (27) ◽

pp. 14241-14246 ◽

Cited By ~ 16

Author(s):

Yoann Tomczak ◽

Kjell Knapas ◽

Markku Sundberg ◽

Markku Leskelä ◽

Mikko Ritala

Keyword(s):

Reaction Mechanism ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

Lithium Silicate ◽

In Situ Reaction ◽

Improving atomic layer deposition process through reactor scale simulation

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2014.07.079 ◽

2014 ◽

Vol 78 ◽

pp. 1243-1253 ◽

Cited By ~ 14

Author(s):

Mohammad Reza Shaeri ◽

Tien-Chien Jen ◽

Chris Yingchun Yuan

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

8.2: High Performance Oxide Thin Film Transistors Fabricated by Atomic Layer Deposition Process

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.15043 ◽

2021 ◽

Vol 52 (S2) ◽

pp. 141-141

Author(s):

Dedong Han ◽

Huijin Li ◽

Junchen Dong ◽

Xiaobin Zhou ◽

Qi Li ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Deposition Process ◽

Oxide Thin Film ◽

Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate.

Superconductor Science and Technology ◽

10.1088/1361-6668/ac0d09 ◽

2021 ◽

Author(s):

Maksim Viktorovich Shibalov ◽

Alexander Mumlyakov ◽

Igor Trofimov ◽

Ekaterina Timofeeva ◽

Anna Sirotina ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Critical Current Density ◽

Critical Current ◽

Current Density ◽

Atomic Layer ◽

Deposition Process ◽

High Critical Current Density ◽

Layer Deposition ◽

Amorphous Substrate

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

physica status solidi (a) ◽

10.1002/pssa.201900237 ◽

2019 ◽

Vol 217 (8) ◽

pp. 1900237

Author(s):

Zhen Zhu ◽

Saoussen Merdes ◽

Oili M. E. Ylivaara ◽

Kenichiro Mizohata ◽

Mikko J. Heikkilä ◽

...

Keyword(s):

Thin Films ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thermal Plasma ◽

Atomic Layer ◽

Deposition Process ◽

Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5130727 ◽

2020 ◽

Vol 38 (2) ◽

pp. 022418

Author(s):

Sun Jung Kim ◽

Sang Heon Yong ◽

You Jin Choi ◽

Hyeok Hwangbo ◽

Woo-Young Yang ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

Plasma Polymer ◽

Moisture Barrier ◽

Barrier Films ◽

An atomic layer deposition process for moving flexible substrates

Chemical Engineering Journal ◽

10.1016/j.cej.2011.03.097 ◽

2011 ◽

Vol 171 (1) ◽

pp. 345-349 ◽

Cited By ~ 46

Author(s):

P.S. Maydannik ◽

T.O. Kääriäinen ◽

D.C. Cameron

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Deposition Process ◽

Flexible Substrates ◽

Deposition of an organic–inorganic hybrid material onto carbon fibers via the introduction of furfuryl alcohol into the atomic layer deposition process of titania and subsequent pyrolysis

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4965699 ◽

2017 ◽

Vol 35 (1) ◽

pp. 01B107 ◽

Cited By ~ 1

Author(s):

Christian Militzer ◽

Stefan Knohl ◽

Volodymyr Dzhagan ◽

Dietrich R. T. Zahn ◽

Werner A. Goedel

Keyword(s):

Atomic Layer Deposition ◽

Carbon Fibers ◽

Hybrid Material ◽

Furfuryl Alcohol ◽

Atomic Layer ◽

Deposition Process ◽

Inorganic Hybrid ◽

Inorganic Hybrid Material ◽

Atomic layer deposition process optimization by computational fluid dynamics

Vacuum ◽

10.1016/j.vacuum.2015.10.023 ◽

2016 ◽

Vol 123 ◽

pp. 103-110 ◽

Cited By ~ 10

Author(s):

Zhang Deng ◽

Wenjie He ◽

Chenlong Duan ◽

Bin Shan ◽

Rong Chen

Keyword(s):

Fluid Dynamics ◽

Computational Fluid Dynamics ◽

Atomic Layer Deposition ◽

Process Optimization ◽

Atomic Layer ◽

Deposition Process ◽