Growth of ultrathin Al2O3 islands on hBN particles by atomic layer deposition in a custom fluidized bed reactor using Al(CH3)3 and H2O
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2019 ◽
Vol 7
(19)
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pp. 5772-5781
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2008 ◽
Vol 18
(4)
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pp. 607-615
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2007 ◽
Vol 201
(22-23)
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pp. 9163-9171
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2017 ◽
Vol 35
(1)
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pp. 01B102
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2004 ◽
Vol 87
(4)
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pp. 762-765
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