Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry
2007 ◽
Vol 201
(22-23)
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pp. 9163-9171
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2019 ◽
Vol 7
(19)
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pp. 5772-5781
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2008 ◽
Vol 18
(4)
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pp. 607-615
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