Two step floating catalyst chemical vapor deposition including in situ fabrication of catalyst nanoparticles and carbon nanotube forest growth with low impurity level

Carbon ◽  
2019 ◽  
Vol 144 ◽  
pp. 152-160 ◽  
Author(s):  
Toshiya Kinoshita ◽  
Motoyuki Karita ◽  
Takayuki Nakano ◽  
Yoku Inoue
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Forest Growth ◽  
Impurity Level ◽  
Catalyst Nanoparticles ◽  
In Situ Fabrication ◽  
Catalyst Chemical Vapor Deposition

In situ monitoring of the electrical property of carbon nanotube thin film in floating catalyst chemical vapor deposition

2022 ◽  
Author(s):  
Hisayoshi Oshima ◽  
katsunori iwase ◽  
Yutaka Ohno
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Film Thickness ◽  
Vapor Deposition ◽  
Circuit Simulation ◽  
Chemical Vapor ◽  
Electrical Circuit ◽  
In Situ Monitoring ◽  
Catalyst Chemical Vapor Deposition

Abstract In floating catalyst chemical vapor deposition (FCCVD), when a carbon nanotube (CNT) network film is produced by filter collection, the film thickness is adjusted by controlling the collection time. However, even with consistent synthesis parameters, the synthesis condition in FCCVD changes constantly depending on the carbon and catalyst adhesion to the inner wall of the reaction tube. Thus, the rate of synthesis changes, making it difficult to obtain the target film thickness repeatedly and stably. We propose a method of monitoring CNT film thickness and percolation threshold by the in situ measurement of the electrical impedance during the deposition. The time evolution of the measured impedance is reproducible by an equivalent electrical circuit simulation.

scholarly journals High throughput production of single-wall carbon nanotube fibres independent of sulfur-source

Nanoscale ◽  
2019 ◽  
Vol 11 (39) ◽  
pp. 18483-18495 ◽  
Author(s):  
Adarsh Kaniyoor ◽  
John Bulmer ◽  
Thurid Gspann ◽  
Jenifer Mizen ◽  
James Ryley ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
High Throughput ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Sulfur Source ◽  
Single Wall Carbon Nanotube ◽  
Single Wall Carbon ◽  
Catalyst Chemical Vapor Deposition

Rapidly jetting precursors in floating catalyst chemical vapor deposition produces monodisperse, metallic single-wall carbon nanotube fibres, irrespective of sulfur source.

Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method

2016 ◽  
Vol 852 ◽  
pp. 308-314
Author(s):  
Er Xiong Ding ◽  
Hong Zhang Geng ◽  
Li He Mao ◽  
Wen Yi Wang ◽  
Yan Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Research Progress ◽  
Chemical Vapor Deposition Method ◽  
In Situ Fabrication ◽  
Microwave Pecvd ◽  
Cnt Arrays ◽  
The Moment

Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.

scholarly journals In Situ Measurement of Carbon Nanotube Growth Kinetics in a Rapid Thermal Chemical Vapor Deposition Reactor With Multizone Infrared Heating

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Moataz Abdulhafez ◽  
Jaegeun Lee ◽  
Mostafa Bedewy
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Infrared Heating ◽  
Ex Situ ◽  
Depth Of Field ◽  
Carbon Nanotube Growth ◽  
Nanotube Growth

Abstract Understanding and controlling the growth of vertically aligned carbon nanotube (VACNT) forests by chemical vapor deposition (CVD) is essential for unlocking their potential as candidate materials for next generation energy and mass transport devices. These advances in CNT manufacturing require developing in situ characterization techniques capable of interrogating how CNTs grow, interact, and self-assemble. Here we present a technique for real-time monitoring of VACNT forest height kinetics applied to a unique custom designed rapid thermal processing (RTP) reactor for CVD of VACNTs. While the integration of multiple infrared heating lamps enables creating designed spatiotemporal temperature profiles inside the reactor, they pose challenges for in situ measurements. Hence, our approach relies on contrast-adjusted videography and image processing, combined with calibration using 3D optical microscopy with large depth-of-field. Our work enables reliably measuring VACNT growth rates and catalytic lifetimes, which are not possible to measure using ex situ methods.

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