Investigation of surface integrity and material removal mechanism of single-crystal Si subjected to micro-laser-assisted machining

2021 ◽  
pp. 103868
Author(s):  
Ruiwen Geng ◽  
Xiaojing Yang ◽  
Qiming Xie ◽  
Ruoyin Zhang ◽  
Wanqing Zhang ◽  
...  
Keyword(s):  
Single Crystal ◽  
Surface Integrity ◽  
Material Removal ◽  
Removal Mechanism ◽  
Material Removal Mechanism ◽  
Laser Assisted Machining

Fundamental study on material removal mechanism in single-crystal germanium

2021 ◽  
pp. 103773
Author(s):  
Ruiwen Geng ◽  
Xiaojing Yang ◽  
Qiming Xie ◽  
Jianguo Xiao ◽  
Wanqing Zhang ◽  
...  
Keyword(s):  
Single Crystal ◽  
Material Removal ◽  
Removal Mechanism ◽  
Material Removal Mechanism ◽  
Fundamental Study
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