In situ real-time analysis of the MBE growth of CdTe on Ge: A comparison of ellipsometry data analysis techniques

2006 ◽  
Vol 296 (2) ◽  
pp. 129-134 ◽  
Author(s):  
G. Badano ◽  
P. Ballet ◽  
X. Baudry ◽  
J.P. Zanatta ◽  
A. Million
1991 ◽  
Vol 222 ◽  
Author(s):  
B. Johs ◽  
J. L. Edwards ◽  
K. T. Shiralagi ◽  
R. Droopad ◽  
K. Y. Choi ◽  
...  

ABSTRACTA modular spectroscopic ellipsometer, capable of both in-situ and ex-situ operation, has been used to measure important growth parameters of GaAs/AIGaAs structures. The ex-situ measurements provided layer thicknesses and compositions of the grown structures. In-situ ellipsometric measurements allowed the determination of growth rates, layer thicknesses, and high temperature optical constants. By performing a regression analysis of the in-situ data in real-time, the thickness and composition of an AIGaAs layer were extracted during the MBE growth of the structure.


2008 ◽  
Vol 39 (4) ◽  
pp. 865-874 ◽  
Author(s):  
G. Reinhart ◽  
A. Buffet ◽  
H. Nguyen-Thi ◽  
B. Billia ◽  
H. Jung ◽  
...  

2008 ◽  
Vol 310 (11) ◽  
pp. 2906-2914 ◽  
Author(s):  
H. Nguyen Thi ◽  
G. Reinhart ◽  
A. Buffet ◽  
T. Schenk ◽  
N. Mangelinck-Noël ◽  
...  

Author(s):  
Matthias Frank ◽  
George Farquar ◽  
Kristl Adams ◽  
Michael Bogan ◽  
Audrey Martin ◽  
...  

2017 ◽  
Vol 2017 (1) ◽  
pp. 000280-000285
Author(s):  
J. Craig Prather ◽  
Michael Bolt ◽  
Haley Harrell ◽  
Tyler Horton ◽  
John Manobianco ◽  
...  

Abstract This work outlines the development and testing of novel in-situ atmospheric sensors. The system is designed for deployment of the sensors en masse to increase the geospatial density of atmospheric measurements. This sensor system is being designed to replace the costly, larger atmospheric sensors currently in use. Improvement in sensor technologies, substrates, and additive manufacturing techniques have allowed for such a device to be realizable. The devices contain a sensor suite that gathers temperature, relative humidity, and pressure from microsensors as well as position, velocity, and heading from a compact GPS receiver. This data is then sent to a base station for analysis by atmospheric scientists, with the potential for real time analysis.


1994 ◽  
Vol 12 (4) ◽  
pp. 1943-1951 ◽  
Author(s):  
A. R. Krauss ◽  
Y. Lin ◽  
O. Auciello ◽  
G. J. Lamich ◽  
D. M. Gruen ◽  
...  

2002 ◽  
Vol 237-239 ◽  
pp. 998-1002 ◽  
Author(s):  
K. Xu ◽  
N. Yano ◽  
A.W. Jia ◽  
A. Yoshikawa ◽  
K. Takahashi

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