Real-Time Analysis Of In-Situ Spectroscopic Ellipsometric Data During Mbe Growth Of III-V Semiconductors

1991 ◽  
Vol 222 ◽  
Author(s):  
B. Johs ◽  
J. L. Edwards ◽  
K. T. Shiralagi ◽  
R. Droopad ◽  
K. Y. Choi ◽  
...  

ABSTRACTA modular spectroscopic ellipsometer, capable of both in-situ and ex-situ operation, has been used to measure important growth parameters of GaAs/AIGaAs structures. The ex-situ measurements provided layer thicknesses and compositions of the grown structures. In-situ ellipsometric measurements allowed the determination of growth rates, layer thicknesses, and high temperature optical constants. By performing a regression analysis of the in-situ data in real-time, the thickness and composition of an AIGaAs layer were extracted during the MBE growth of the structure.

2006 ◽  
Vol 296 (2) ◽  
pp. 129-134 ◽  
Author(s):  
G. Badano ◽  
P. Ballet ◽  
X. Baudry ◽  
J.P. Zanatta ◽  
A. Million

2008 ◽  
Vol 39 (4) ◽  
pp. 865-874 ◽  
Author(s):  
G. Reinhart ◽  
A. Buffet ◽  
H. Nguyen-Thi ◽  
B. Billia ◽  
H. Jung ◽  
...  

2008 ◽  
Vol 310 (11) ◽  
pp. 2906-2914 ◽  
Author(s):  
H. Nguyen Thi ◽  
G. Reinhart ◽  
A. Buffet ◽  
T. Schenk ◽  
N. Mangelinck-Noël ◽  
...  

2003 ◽  
Vol 52 (3) ◽  
pp. 295-303 ◽  
Author(s):  
YOSHITAKE OSHIMA ◽  
TOSHIKAZU SHIGA ◽  
TOSHIO MORITANI ◽  
IZURU MASUDA ◽  
TATSUYA HAYASHI ◽  
...  

2017 ◽  
Vol 2017 (1) ◽  
pp. 000280-000285
Author(s):  
J. Craig Prather ◽  
Michael Bolt ◽  
Haley Harrell ◽  
Tyler Horton ◽  
John Manobianco ◽  
...  

Abstract This work outlines the development and testing of novel in-situ atmospheric sensors. The system is designed for deployment of the sensors en masse to increase the geospatial density of atmospheric measurements. This sensor system is being designed to replace the costly, larger atmospheric sensors currently in use. Improvement in sensor technologies, substrates, and additive manufacturing techniques have allowed for such a device to be realizable. The devices contain a sensor suite that gathers temperature, relative humidity, and pressure from microsensors as well as position, velocity, and heading from a compact GPS receiver. This data is then sent to a base station for analysis by atmospheric scientists, with the potential for real time analysis.


1994 ◽  
Vol 12 (4) ◽  
pp. 1943-1951 ◽  
Author(s):  
A. R. Krauss ◽  
Y. Lin ◽  
O. Auciello ◽  
G. J. Lamich ◽  
D. M. Gruen ◽  
...  

1990 ◽  
Vol 216 ◽  
Author(s):  
Blaine Johs ◽  
Duane Meyer ◽  
Gerald Cooney ◽  
Huade Yao ◽  
Paul G. Snyder ◽  
...  

ABSTRACTA modular spectroscopic ellipsometer for in situ and ex situ materials analysis is described, and results for in situ MBE growth of GaAs/AlGaAs are reported.


2002 ◽  
Vol 237-239 ◽  
pp. 998-1002 ◽  
Author(s):  
K. Xu ◽  
N. Yano ◽  
A.W. Jia ◽  
A. Yoshikawa ◽  
K. Takahashi

ChemCatChem ◽  
2016 ◽  
Vol 8 (11) ◽  
pp. 1937-1944 ◽  
Author(s):  
Dimitrije Cicmil ◽  
Jurjen Meeuwissen ◽  
Aurélien Vantomme ◽  
Bert M. Weckhuysen

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