Experimental and numerical approaches on the effect of gas flow on the formation of tens-square-cm-scale mat of silicon nanowires from SiCl4 and zinc vapor

2019 ◽  
Vol 520 ◽  
pp. 11-17 ◽  
Author(s):  
Susumu Inasawa ◽  
Kai Inoue
Author(s):  
E. Tamayo-Mas ◽  
J.F. Harrington ◽  
T. Brüning ◽  
H. Shao ◽  
E.E. Dagher ◽  
...  

2016 ◽  
Vol 2016 ◽  
pp. 1-9 ◽  
Author(s):  
Sooseok Choi ◽  
Hyunjun Lee ◽  
Dong-Wha Park

Silicon nanomaterials were synthesized from solid silicon powder in microsize using a nontransferred arc plasma system. Synthesized silicon nanomaterials were sphere or wire in morphology according to the input power of arc plasma, the flow rate of plasma forming gas, and the collecting position of product. The product was spherical nanoparticles at a high input power for complete evaporation, while it was nanowires at a relatively low input power. The mean diameter of synthesized silicon nanoparticles was increased from 20.52 nm to 40.01 nm by increasing the input power from 9 kW to 13 kW. On the other hand, the diameter of silicon nanowires was controllable by changing the flow rate of plasma forming gas. The mean diameter of silicon nanowires was increased from 16.69 nm to 23.03 nm by decreasing the plasma forming gas flow rate from 15 L/min to 12 L/min.


2010 ◽  
Vol 1258 ◽  
Author(s):  
Annika Gewalt ◽  
Bodo Kalkofen ◽  
Marco Lisker ◽  
Edmund P. Burte

AbstractIn this study, we investigated the growth of silicon nanowires forced by small gallium droplet templates. Those gallium islands previously were deposited by a modified PECVD method. Two different delivery techniques of the trimethylgallium precursor (TMGa) were tested regarding their applicability. On the one hand standard liquid delivery was performed, on the other the precursor was transported by vapor draw out of the heated bubbler. The TMGa then was pulsed into the carrier gas flow. The effects on the deposited islands of both delivery methods were compared. As substrates <111> oriented p-doped silicon wafers were used. For the subsequent growth of the silicon wires similarly PECVD was used as growth method. Silane served as precursor. Argon and hydrogen were used as plasma enhanced gases. The effects of the Ga particles deposited by both process modes upon the generated wires were analyzed.


2005 ◽  
Vol 879 ◽  
Author(s):  
Rezina Siddique ◽  
George Sirinakis ◽  
Michael A. Carpenter

AbstractSilicon Nanowires (SiNWs) have many potential applications that include diodes, transistors, logic gates, circuitry, and sensors. SiNWs also open the possibility for integrating optoelectronics with microelectronics, since silicon has semiconducting properties and amorphous silicon nanowires have been shown to emit blue light. It has been demonstrated that SiNWs have tunable electrical properties, depending on the dopant used. With such a range of applications, the ability to mass-produce silicon nanowires simply and easily with no other source of silicon needed other than the substrate itself will prove very useful. Such methods have previously been reported, but our method involves production of the SiNWs at a lower temperature than those widely observed. A (100) silicon substrate was cleaned for five minutes each in ethanol followed by acetone. Films with thicknesses of less than 20 nm of either gold or 60/40 gold/palladium were deposited on the substrate through physical vapor deposition to serve as the growth center for the SiNWs. The samples were placed in a furnace and annealed to 900° C, under a 1500 sccm flow of argon at atmospheric pressure. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were used for characterization of the SiNWs. The resulting SiNWs were amorphous in structure and very convoluted, with lengths on the order of tens of microns, diameters of 40 nm and a bed thickness of approximately 10 m. The effect of varying gold concentration, annealing time, temperature, and gas flow rate were then investigated. The results, which will be discussed in further detail, indicate that adjusting these parameters allows for control over the length, thickness, density, and morphology of the nanowires.


2016 ◽  
Vol 122 (3) ◽  
Author(s):  
Habib Hamidinezhad ◽  
Ali Akbar Ashkarran ◽  
Zulkurnain Abdul-Malek

nano Online ◽  
2016 ◽  
Author(s):  
Dongjea Seo ◽  
Jaejun Lee ◽  
Sung Wook Kim ◽  
Ilsoo Kim ◽  
Jukwan Na ◽  
...  

2000 ◽  
Vol 638 ◽  
Author(s):  
Jifa Qi ◽  
Yasuaki Masumoto

AbstractSilicon nanowires containing a high density of copper atoms were prepared by laser ablation of Si/metal mixture targets at 1200 °C in argon gas flow. Copper atoms can gather in Si nanowires and precipitate into copper silicide nanocrystals distributed alone the wire axis. The diameters of the copper silicide nanocrystals increase with that of the host nanowire. The possible growth process of the composite nanowires was proposed.


2019 ◽  
Author(s):  
J. Harrington ◽  
E. Tamayo-Mas ◽  
H. Shao ◽  
E.E. Dagher ◽  
J. Lee ◽  
...  

2015 ◽  
Vol 10 (1) ◽  
Author(s):  
Dongjea Seo ◽  
Jaejun Lee ◽  
Sung Wook Kim ◽  
Ilsoo Kim ◽  
Jukwan Na ◽  
...  

Author(s):  
N. David Theodore ◽  
Mamoru Tomozane ◽  
Ming Liaw

There is extensive interest in SiGe for use in heterojunction bipolar transistors. SiGe/Si superlattices are also of interest because of their potential for use in infrared detectors and field-effect transistors. The processing required for these materials is quite compatible with existing silicon technology. However, before SiGe can be used extensively for devices, there is a need to understand and then control the origin and behavior of defects in the materials. The present study was aimed at investigating the structural quality of, and the behavior of defects in, graded SiGe layers grown by chemical vapor deposition (CVD).The structures investigated in this study consisted of Si1-xGex[x=0.16]/Si1-xGex[x= 0.14, 0.13, 0.12, 0.10, 0.09, 0.07, 0.05, 0.04, 0.005, 0]/epi-Si/substrate heterolayers grown by CVD. The Si1-xGex layers were isochronally grown [t = 0.4 minutes per layer], with gas-flow rates being adjusted to control composition. Cross-section TEM specimens were prepared in the 110 geometry. These were then analyzed using two-beam bright-field, dark-field and weak-beam images. A JEOL JEM 200CX transmission electron microscope was used, operating at 200 kV.


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