scholarly journals Geometrical defect identification of a SCARA robot from a vector modeling of kinematic joints invariants

2021 ◽  
Vol 162 ◽  
pp. 104339
Author(s):  
Hélène Chanal ◽  
Jean Baptiste Guyon ◽  
Adrien Koessler ◽  
Quentin Dechambre ◽  
Benjamin Boudon ◽  
...  
Author(s):  
Wing Chiu Tam ◽  
Osei Poku ◽  
R. D. (Shawn) Blanton

Abstract Systematic defects due to design-process interactions are a dominant component of integrated circuit (IC) yield loss in nano-scaled technologies. Test structures do not adequately represent the product in terms of feature diversity and feature volume, and therefore are unable to identify all the systematic defects that affect the product. This paper describes a method that uses diagnosis to identify layout features that do not yield as expected. Specifically, clustering techniques are applied to layout snippets of diagnosis-implicated regions from (ideally) a statistically-significant number of IC failures for identifying feature commonalties. Experiments involving an industrial chip demonstrate the identification of possible systematic yield loss due to lithographic hotspots.


Author(s):  
H.H. Yap ◽  
P.K. Tan ◽  
G.R. Low ◽  
M.K. Dawood ◽  
H. Feng ◽  
...  

Abstract With technology scaling of semiconductor devices and further growth of the integrated circuit (IC) design and function complexity, it is necessary to increase the number of transistors in IC’s chip, layer stacks, and process steps. The last few metal layers of Back End Of Line (BEOL) are usually very thick metal lines (>4μm thickness) and protected with hard Silicon Dioxide (SiO2) material that is formed from (TetraEthyl OrthoSilicate) TEOS as Inter-Metal Dielectric (IMD). In order to perform physical failure analysis (PFA) on the logic or memory, the top thick metal layers must be removed. It is time-consuming to deprocess those thick metal and IMD layers using conventional PFA workflows. In this paper, the Fast Laser Deprocessing Technique (FLDT) is proposed to remove the BEOL thick and stubborn metal layers for memory PFA. The proposed FLDT is a cost-effective and quick way to deprocess a sample for defect identification in PFA.


2019 ◽  
Author(s):  
Ujwal Shirode ◽  
Aishwarya Aher ◽  
Pallavi Bale ◽  
Aishwarya Kadam

Sensors ◽  
2021 ◽  
Vol 21 (13) ◽  
pp. 4292
Author(s):  
Horng-Horng Lin ◽  
Harshad Kumar Dandage ◽  
Keh-Moh Lin ◽  
You-Teh Lin ◽  
Yeou-Jiunn Chen

Solar cells may possess defects during the manufacturing process in photovoltaic (PV) industries. To precisely evaluate the effectiveness of solar PV modules, manufacturing defects are required to be identified. Conventional defect inspection in industries mainly depends on manual defect inspection by highly skilled inspectors, which may still give inconsistent, subjective identification results. In order to automatize the visual defect inspection process, an automatic cell segmentation technique and a convolutional neural network (CNN)-based defect detection system with pseudo-colorization of defects is designed in this paper. High-resolution Electroluminescence (EL) images of single-crystalline silicon (sc-Si) solar PV modules are used in our study for the detection of defects and their quality inspection. Firstly, an automatic cell segmentation methodology is developed to extract cells from an EL image. Secondly, defect detection can be actualized by CNN-based defect detector and can be visualized with pseudo-colors. We used contour tracing to accurately localize the panel region and a probabilistic Hough transform to identify gridlines and busbars on the extracted panel region for cell segmentation. A cell-based defect identification system was developed using state-of-the-art deep learning in CNNs. The detected defects are imposed with pseudo-colors for enhancing defect visualization using K-means clustering. Our automatic cell segmentation methodology can segment cells from an EL image in about 2.71 s. The average segmentation errors along the x-direction and y-direction are only 1.6 pixels and 1.4 pixels, respectively. The defect detection approach on segmented cells achieves 99.8% accuracy. Along with defect detection, the defect regions on a cell are furnished with pseudo-colors to enhance the visualization.


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