Optimization design of a compliant linear guide for high-precision feed drive mechanisms

2021 ◽  
Vol 165 ◽  
pp. 104442
Author(s):  
Van-Khien Nguyen ◽  
Huy-Tuan Pham ◽  
Huy-Hoang Pham ◽  
Quang-Khoa Dang
Keyword(s):  
High Precision ◽  
Optimization Design ◽  
Linear Guide ◽  
Feed Drive

A Large Range Compliant Nano-Manipulator Supporting Electron Beam Lithography

2022 ◽  
pp. 1-48
Author(s):  
Yijie Liu ◽  
Zhen Zhang
Keyword(s):  
Electron Beam ◽  
Natural Frequency ◽  
High Precision ◽  
Electron Beam Lithography ◽  
Optimization Design ◽  
Large Range ◽  
Direct Write ◽  
Motion Stage ◽  
Cross Axis ◽  
Precision Motion

Abstract Electron beam lithography (EBL) is an important lithographic process of scanning a focused electron beam (e-beam) to direct write a custom pattern with nanometric accuracy. Due to the very limited field of the focused election beam, a motion stage is needed to move the sample to the e-beam field for processing large patterns. In order to eliminate the stitching error induced by the existing “step and scan” process, we in this paper propose a large range compliant nano-manipulator so that the manipulator and the election beam can be moved in a simultaneous manner. We also present an optimization design for the geometric parameters of the compliant manipulator under the vacuum environment. Experimental results demonstrate 1 mm × 1 mm travel range with high linearity, ~ 0.5% cross-axis error and 5 nm resolution. Moreover, the high natural frequency (~ 56 Hz) of the manipulator facilitates it to achieve high-precision motion of EBL.

Design and characteristic analysis of an aerostatic decoupling table for microelectronic packaging

2017 ◽  
Vol 232 (6) ◽  
pp. 1079-1090 ◽  
Author(s):  
Cunman Liang ◽  
Fujun Wang ◽  
Qingguo Yang ◽  
Yanling Tian ◽  
Xingyu Zhao ◽  
...  
Keyword(s):  
High Precision ◽  
Optimization Design ◽  
Micro Electro Mechanical System ◽  
Navier Stokes ◽  
Orifice Diameter ◽  
Precision Positioning ◽  
Characteristic Analysis ◽  
Navier Stokes Equation ◽  
Decoupling Mechanism ◽  
Aerostatic Bearings

This paper presents a novel 2-DOF XY table with high-precision positioning to improve the efficiency and precision of micro-electro-mechanical system packaging. The XY table, which is supported by aerostatic bearings to realize high-precision positioning motion, is directly driven by two linear voice coil actuators. The motion decoupling between the X-and Y-axes is realized through a novel aerostatic decoupling mechanism, by which the mass and inertia of motion parts are reduced significantly. The mechanical structure of the XY table is designed and the decoupling mechanism is studied. Based on the Navier–Stokes equation, the influences of orifice diameter and lubrication gap on the carrying capacity as well the static stiffness of the aerostatic bearings are analyzed. The parameters of the aerostatic bearings are determined by single factor method. Using the finite element method, the static, modal, and transient analyses of the developed positioning table are carried out to investigate the characteristics of the positioning table. The results show that the positioning table provides good performance and can also provide important information for the optimization design and control of this kind of the positioning table.

Design and Control of Planar Parallel Mechanisms with High Speed and High Precision

2006 ◽  
Vol 315-316 ◽  
pp. 872-0
Author(s):  
L.N. Sun ◽  
Y.J. Liu ◽  
J. Li ◽  
J. Cui
Keyword(s):  
High Precision ◽  
Disturbance Observer ◽  
High Speed ◽  
Optimization Design ◽  
Advanced Manufacturing ◽  
Parallel Mechanisms ◽  
Direct Drive ◽  
End Effector ◽  
Load Disturbance ◽  
And Control

In order to satisfy the requirement of advanced manufacturing equipments with high speed and high precision, two planar parallel mechanisms have been developed. Based on these mechanisms, firstly, in consideration with the velocity and the precision of the end-effector together, the dimension optimization design is performed based on conditioning index and the precision characteristics. Then a disturbance observer is designed for the purpose of restraining load disturbance in the direct-drive system, and the experimental results show that load disturbance can be effectively restrained by the disturbance observer.

scholarly journals DESIGN OF A FAST SERVO MULTI-ELEMENT FEED DRIVE

2011 ◽  
Author(s):  
A. T. Elfizy ◽  
M. A. Elbestawi
Keyword(s):  
High Resolution ◽  
Data Storage ◽  
High Precision ◽  
Experimental Testing ◽  
Drive System ◽  
Precision Positioning ◽  
Chatter Suppression ◽  
Feed Drive ◽  
In Series ◽  
Feed Drive System

High precision positioning has become one of the most important features of a precision machine. Such a machine is required to provide versatility, speed and workspace and high precision positioning. Combining coarse (large stroke) and fine (high resolution) drive elements, connected in series, in a multi-element feed drive system provides the capacity of a large workspace with the property of high resolution motion. The performance of the whole system may be improved by adopting the merits of both drive elements to work in a complementary fashion. The multi-element feed drive concept has several applications in manufacturing, robotics and data storage. Fast tool servo in manufacturing is a direct use of the concept and its applications range from the creation of asymmetric surfaces to online chatter suppression. Micro-macro robots are also examples of multi-element feed drive systems that provide advantages when both large work space and accurate end-effector positioning are required. This paper presents an innovative design of a multi-element feed drive system for machine tools. It studies the design methodology and the implementation of the system and investigates several considerations that govern the design process and determine the performance. A multi-element feed drive setup based on a combination of PA and LM was built for experimental testing. Results show that the multi-element feed drive is able to improve the tracking performance as well as the steady state error. It also achieves faster settling time.

The Optimization Design of High Precision Long-Range Cartesian Coordinate Robots’ Drive System

2013 ◽  
Vol 302 ◽  
pp. 574-577 ◽  
Author(s):  
Xian Teng Han ◽  
Yu Wang ◽  
He Ting Tong
Keyword(s):  
Long Range ◽  
High Precision ◽  
Optimization Design ◽  
Drive System ◽  
Transmission Mechanism ◽  
Heavy Load ◽  
Timing Belt ◽  
Cartesian Coordinate ◽  
Cam Gear

At present, Cartesian Coordinate Robot driving systems have several ways, such as timing-belt, screw, rack-pinion and chain. But, they are difficult to synchronously meet needs of high precision, long range and heavy load. In this paper, Trochoid Cam Gear (TCG) was used as main transmission mechanism to implement high precision and long range motion of the secondary girder of a Cartesian Coordinate Robot, and disposed reasonably the space positions of linear rails and servo motors to meet the needs of heavy load.

Optimization design about gimbal structure of high-precision autonomous celestial navigation tracking mirror system

2016 ◽  
Author(s):  
Wei Huang ◽  
Xiao-xu Yang ◽  
Jun-feng Han ◽  
Yu Wei ◽  
Jing Zhang ◽  
...  
Keyword(s):  
High Precision ◽  
Optimization Design ◽  
Mirror System ◽  
Celestial Navigation

scholarly journals Design and Implementation of a High Precision Stewart Platform for a Space Camera

2021 ◽  
Vol 2101 (1) ◽  
pp. 012015
Author(s):  
Fengchao Liang ◽  
Shuang Tan ◽  
Jiankai Fan ◽  
Zhe Lin ◽  
Xiaojun Kang
Keyword(s):  
High Precision ◽  
Optimization Design ◽  
Degrees Of Freedom ◽  
Structural Parameters ◽  
Stewart Platform ◽  
Ball Screw ◽  
Dual Frequency ◽  
Loop Control ◽  
Brushless Dc ◽  
Secondary Mirror

Abstract In order to design and implement a high-precision Stewart platform to precisely adjust the position and posture of the secondary mirror of a space camera, the following measures were taken: firstly, the inverse mathematical model and ADAMS parametric model of the Stewart platform are established, which are the basis of structural optimization design; secondly, the structural parameters of Stewart platform are obtained through structure optimization design in ADAMS after determining the objective function; thirdly, a 50nm resolution driving strut based on brushless DC motor, ball screw, grating ruler and PI closed-loop control law is designed, which strongly guaranteed the six degrees’ resolution of the Stewart platform that mainly consist of 6 such high-resolution driving struts; finally, the accuracy of Stewart platform is tested via dual frequency laser interferometer and photoelectric autocollimator, and the test results show that the displacement resolution of the Stewart platform is 0.2 μ m, and the angular resolution is 1”, which meets the requirements of the index. The Stewart platform has been successfully applied to the space camera by tuning the secondary mirror precisely in 6 degrees of freedom in the optical alignment experiment, which lays a solid theoretical and practical foundation for on orbit application in future.

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