Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors

Microelectronics Reliability ◽

10.1016/j.microrel.2016.07.108 ◽

2016 ◽

Vol 64 ◽

pp. 656-659 ◽

Cited By ~ 2

Author(s):

S. Oberhoff ◽

K. Goetz ◽

K. Trojan ◽

M. Zoeller ◽

J. Glueck

Keyword(s):

Failure Analysis ◽

High Frequency ◽

Reliability Assessment ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Mems Sensors ◽

Frequency Scanning

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High frequency scanning acoustic microscopy: a novel non-destructive surface analytical tool for assessment of coating-specific elastic moduli and tomographic study of subsurface defects

Thin Solid Films ◽

10.1016/s0040-6090(99)00542-8 ◽

1999 ◽

Vol 355-356 ◽

pp. 347-352 ◽

Cited By ~ 13

Author(s):

D. Rats ◽

J. von Stebut ◽

F. Augereau

Keyword(s):

High Frequency ◽

Elastic Moduli ◽

Analytical Tool ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning ◽

Non Destructive ◽

Subsurface Defects

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High frequency scanning acoustic microscopy applied to 3D integrated process: Void detection in Through Silicon Vias

2013 IEEE 63rd Electronic Components and Technology Conference ◽

10.1109/ectc.2013.6575576 ◽

2013 ◽

Cited By ~ 12

Author(s):

Alain Phommahaxay ◽

Ingrid De Wolf ◽

Peter Hoffrogge ◽

Sebastian Brand ◽

Peter Czurratis ◽

...

Keyword(s):

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Integrated Process ◽

Through Silicon Vias ◽

Void Detection ◽

Frequency Scanning ◽

Silicon Vias

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Simulations for investigating contrast mechanism of biological cells with high‐frequency scanning acoustic microscopy.

The Journal of the Acoustical Society of America ◽

10.1121/1.3383455 ◽

2010 ◽

Vol 127 (3) ◽

pp. 1732-1732

Author(s):

Yada Juntarapaso ◽

Richard L. Tutwiler

Keyword(s):

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Biological Cells ◽

Frequency Scanning ◽

Contrast Mechanism

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High-power acoustic insult to living cultured cells as studied by high-frequency scanning acoustic microscopy

10.1117/12.469895 ◽

2002 ◽

Author(s):

Chiaki Miyasaka ◽

Bernhard R. Tittmann

Keyword(s):

High Power ◽

High Frequency ◽

Cultured Cells ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning

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Transducer designs and simulations for high frequency scanning acoustic microscopy for applications in exploring contrast mechanism and the mechanical properties of biological cells

The Journal of the Acoustical Society of America ◽

10.1121/1.3654888 ◽

2011 ◽

Vol 130 (4) ◽

pp. 2462-2462

Author(s):

Yada Juntarapaso ◽

Richard L. Tutwiler ◽

Pavlos Anastasiadis

Keyword(s):

Mechanical Properties ◽

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Biological Cells ◽

Frequency Scanning ◽

Contrast Mechanism

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Inverted high frequency Scanning Acoustic Microscopy inspection of power semiconductor devices

Microelectronics Reliability ◽

10.1016/j.microrel.2012.06.064 ◽

2012 ◽

Vol 52 (9-10) ◽

pp. 2115-2119 ◽

Cited By ~ 7

Author(s):

Poschgan Mario ◽

Maynollo Josef ◽

Inselsbacher Michael

Keyword(s):

High Frequency ◽

Semiconductor Devices ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Power Semiconductor ◽

Power Semiconductor Devices ◽

Frequency Scanning

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Breast tissue characterization with high‐frequency scanning acoustic microscopy

The Journal of the Acoustical Society of America ◽

10.1121/1.4780120 ◽

2004 ◽

Vol 115 (5) ◽

pp. 2376-2376 ◽

Cited By ~ 4

Author(s):

R. E. Kumon ◽

I. Bruno ◽

B. Heartwell ◽

E. Maeva

Keyword(s):

High Frequency ◽

Breast Tissue ◽

Tissue Characterization ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning

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Imaging Defects in Thin DLC Coatings Using High Frequency Scanning Acoustic Microscopy

10.1063/1.1711724 ◽

2004 ◽

Author(s):

Dong Fei

Keyword(s):

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Dlc Coatings ◽

Frequency Scanning

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High Frequency Scanning Acoustic Microscopy as Diagnostic Tool in Tissue Science

Journal of Biotechnology & Biomaterials ◽

10.4172/2155-952x.1000160 ◽

2013 ◽

Vol 03 (03) ◽

Author(s):

Xiaoning Xi Xin Li

Keyword(s):

Diagnostic Tool ◽

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning

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Near-Field Defects Imaging in Thin DLC Coatings Using High-Frequency Scanning Acoustic Microscopy

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques ◽

10.1134/s1027451018050737 ◽

2018 ◽

Vol 12 (6) ◽

pp. 1285-1293

Author(s):

P. V. Zinin ◽

I. B. Kutuza ◽

S. A. Titov

Keyword(s):

High Frequency ◽

Near Field ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Dlc Coatings ◽

Frequency Scanning ◽

Field Defects

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