Inverted high frequency Scanning Acoustic Microscopy inspection of power semiconductor devices

Microelectronics Reliability ◽

10.1016/j.microrel.2012.06.064 ◽

2012 ◽

Vol 52 (9-10) ◽

pp. 2115-2119 ◽

Author(s):

Poschgan Mario ◽

Maynollo Josef ◽

Inselsbacher Michael

Keyword(s):

High Frequency ◽

Semiconductor Devices ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Power Semiconductor ◽

Power Semiconductor Devices ◽

Frequency Scanning

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Scanning Acoustic Microscopy as a Non-Destructive Technique for Process Monitoring of High Power Semiconductor Devices

Acoustical Imaging ◽

10.1007/978-1-4615-3370-2_114 ◽

1992 ◽

pp. 723-729 ◽

Author(s):

J. Attal ◽

B. Bianco ◽

A. Cambiaso ◽

D. E. Crees ◽

P. Dargent ◽

...

Keyword(s):

Process Monitoring ◽

Semiconductor Devices ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Power Semiconductor ◽

Power Semiconductor Devices ◽

Non Destructive

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High frequency scanning acoustic microscopy: a novel non-destructive surface analytical tool for assessment of coating-specific elastic moduli and tomographic study of subsurface defects

Thin Solid Films ◽

10.1016/s0040-6090(99)00542-8 ◽

1999 ◽

Vol 355-356 ◽

pp. 347-352 ◽

Author(s):

D. Rats ◽

J. von Stebut ◽

F. Augereau

Keyword(s):

High Frequency ◽

Elastic Moduli ◽

Analytical Tool ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning ◽

Non Destructive ◽

Subsurface Defects

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High frequency scanning acoustic microscopy applied to 3D integrated process: Void detection in Through Silicon Vias

2013 IEEE 63rd Electronic Components and Technology Conference ◽

10.1109/ectc.2013.6575576 ◽

2013 ◽

Author(s):

Alain Phommahaxay ◽

Ingrid De Wolf ◽

Peter Hoffrogge ◽

Sebastian Brand ◽

Peter Czurratis ◽

...

Keyword(s):

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Integrated Process ◽

Through Silicon Vias ◽

Void Detection ◽

Frequency Scanning ◽

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Non-Magnetic Resonant-Type High-Frequency High-Voltage Power Conversion with Silicon Carbide Power Semiconductor Devices

2018 1st Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia) ◽

10.1109/wipdaasia.2018.8734641 ◽

2018 ◽

Author(s):

Yu Chen ◽

Chengmin Li ◽

Wuhua Li ◽

Xiangning He ◽

Saijun Mao ◽

...

Keyword(s):

Silicon Carbide ◽

High Voltage ◽

High Frequency ◽

Semiconductor Devices ◽

Power Conversion ◽

Power Semiconductor ◽

Power Semiconductor Devices

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High frequency high voltage power conversion with silicon carbide power semiconductor devices

2016 6th Electronic System-Integration Technology Conference (ESTC) ◽

10.1109/estc.2016.7764721 ◽

2016 ◽

Author(s):

Saijun Mao ◽

Tao Wu ◽

Xi Lu ◽

Jelena Popovic ◽

Jan Abraham Ferreira

Keyword(s):

Silicon Carbide ◽

High Voltage ◽

High Frequency ◽

Semiconductor Devices ◽

Power Conversion ◽

Power Semiconductor ◽

Power Semiconductor Devices

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Simulations for investigating contrast mechanism of biological cells with high‐frequency scanning acoustic microscopy.

The Journal of the Acoustical Society of America ◽

10.1121/1.3383455 ◽

2010 ◽

Vol 127 (3) ◽

pp. 1732-1732

Author(s):

Yada Juntarapaso ◽

Richard L. Tutwiler

Keyword(s):

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Biological Cells ◽

Frequency Scanning ◽

Contrast Mechanism

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High-power acoustic insult to living cultured cells as studied by high-frequency scanning acoustic microscopy

10.1117/12.469895 ◽

2002 ◽

Author(s):

Chiaki Miyasaka ◽

Bernhard R. Tittmann

Keyword(s):

High Frequency ◽

Cultured Cells ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning

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Transducer designs and simulations for high frequency scanning acoustic microscopy for applications in exploring contrast mechanism and the mechanical properties of biological cells

The Journal of the Acoustical Society of America ◽

10.1121/1.3654888 ◽

2011 ◽

Vol 130 (4) ◽

pp. 2462-2462

Author(s):

Yada Juntarapaso ◽

Richard L. Tutwiler ◽

Pavlos Anastasiadis

Keyword(s):

Mechanical Properties ◽

High Frequency ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Biological Cells ◽

Frequency Scanning ◽

Contrast Mechanism

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Breast tissue characterization with high‐frequency scanning acoustic microscopy

The Journal of the Acoustical Society of America ◽

10.1121/1.4780120 ◽

2004 ◽

Vol 115 (5) ◽

pp. 2376-2376 ◽

Author(s):

R. E. Kumon ◽

I. Bruno ◽

B. Heartwell ◽

E. Maeva

Keyword(s):

High Frequency ◽

Breast Tissue ◽

Tissue Characterization ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Frequency Scanning

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Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors

Microelectronics Reliability ◽

10.1016/j.microrel.2016.07.108 ◽

2016 ◽

Vol 64 ◽

pp. 656-659 ◽

Author(s):

S. Oberhoff ◽

K. Goetz ◽

K. Trojan ◽

M. Zoeller ◽

J. Glueck

Keyword(s):

Failure Analysis ◽

High Frequency ◽

Reliability Assessment ◽

Acoustic Microscopy ◽

Scanning Acoustic Microscopy ◽

Mems Sensors ◽

Frequency Scanning

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