Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films
2018 ◽
Vol 88-90
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pp. 829-834
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Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽
Vol 167
(11)
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pp. 112505
2020 ◽
Vol 1461
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pp. 012193
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