Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography system
2013 ◽
Vol 103
◽
pp. 137-143
◽
2004 ◽
Vol 22
(6)
◽
pp. 3557
◽
2011 ◽
Vol 2
(4)
◽
1991 ◽
Vol 49
◽
pp. 478-479
2018 ◽
1995 ◽
Vol 34
(Part 2, No. 7B)
◽
pp. L948-L950