Sapphire is a preferred substrate for high frequency applications where small dielectric constants and low loss tangents are required. It is also much cheaper than other oxide subsrates such as SrTiO 3, LaAlO 3, NdGaO 3, MgO, and yttria-stabilized zirconia (YSZ) for high T c superconducting thin films. Unfortunately, sapphire is not chemically compatible with the high T c superconductors at the processing temperature required to obtained good superconducting properties. As a result, an appropriate buffer layer on sapphire is required.