A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor

2021 ◽  
Vol 67 ◽  
pp. 1-13
Author(s):  
Lue Quan ◽  
Yuki Shimizu ◽  
Xin Xiong ◽  
Hiraku Matsukuma ◽  
Wei Gao
Author(s):  
Yuki Shimizu ◽  
Shota Takazono ◽  
Yuri Kanda ◽  
Hiraku Matsukuma ◽  
Wei Gao ◽  
...  

Abstract Angle sensors based on the laser autocollimation are often employed to evaluate surface profiles of a target of interest. The authors have developed a femtosecond laser angle sensor, in which a spectrometer or an optical spectrum analyzer with a single-mode fiber is employed as the photodetector for simultaneous capturing of the multiple optical modes. In this paper, the concept of the femtosecond laser angle sensor is applied to evaluate the surface profile of a target of interest. An optical setup is designed in such a way that each mode in the spectrum of the mode-locked femtosecond is utilized as the laser beam to measure the local slope of a measurement target at each different point to evaluate the surface profile. Some basic experiments are carried out by using the developed optical setup with a mode-locked femtosecond laser source to evaluate basic performances of the developed optical setup as an optical angle sensor.


2001 ◽  
Vol 67 (3) ◽  
pp. 493-497
Author(s):  
Satoshi KIYONO ◽  
Wei GAO ◽  
Masaya KANAI ◽  
Tadashi HOSHINO ◽  
Yuki SHIMIZU

2020 ◽  
Vol 10 (11) ◽  
pp. 4047 ◽  
Author(s):  
Yuki Shimizu ◽  
Hiraku Matsukuma ◽  
Wei Gao

A mode-locked femtosecond laser, which is often referred to as the optical frequency comb, has increasing applications in various industrial fields, including production engineering, in the last two decades. Many efforts have been made so far to apply the mode-locked femtosecond laser to the absolute distance measurement. In recent years, a mode-locked femtosecond laser has increasing application in angle measurement, where the unique characteristics of the mode-locked femtosecond laser such as the stable optical frequencies, equally-spaced modes in frequency domain, and the ultra-short pulse trains with a high peak power are utilized to achieve precision and stable angle measurement. In this review article, some of the optical angle sensor techniques based on the mode-locked femtosecond laser are introduced. First, the angle scale comb, which can be generated by combining the dispersive characteristic of a scale grating and the discretized modes in a mode-locked femtosecond laser, is introduced. Some of the mode-locked femtosecond laser autocollimators, which have been realized by combining the concept of the angle scale comb with the laser autocollimation, are also explained. Angle measurement techniques based on the absolute distance measurements, lateral chromatic aberration, and second harmonic generation (SHG) are also introduced.


2020 ◽  
Vol 14 (1) ◽  
pp. 52-58
Author(s):  
Tatsuya Kume ◽  
Masanori Satoh ◽  
Tsuyoshi Suwada ◽  
Kazuro Furukawa ◽  
Eiki Okuyama ◽  
...  

An angle sensor can be used to evaluate profiles without any shape references. We regard it suitable for evaluating a large profile and consider a gyro as an angle sensor for evaluating a profile larger than 100 m with an accuracy of better than 1 mm. A gyro can evaluate profiles without restrictions in span or direction; however, angles detected by a gyro typically fluctuate unacceptably for our purpose. We demonstrate that periodical reversal measurement by flipping a gyro is effective in reducing the effect of the fluctuation. Then, we rotate the gyro for continuously realizing the reversal, where the angles of the gyro’s rotating axis against the earth’s rotating axis can be derived without being affected by the fluctuation, and can be used as an angle sensor. Here, we consider a new method using gyro signals rotating around four orthogonally aligned axes. This can improve the accuracy of the derived angles by eliminating the effects of the gyro’s scale factor as well as the fluctuations.


2020 ◽  
Vol 2020.55 (0) ◽  
pp. 130_paper
Author(s):  
Lue QUAN ◽  
Hiraku MATSUKUMA ◽  
Yuki SHIMIZU ◽  
Wei GAO

Sensors ◽  
2021 ◽  
Vol 21 (21) ◽  
pp. 7412
Author(s):  
Xin Xiong ◽  
Yuki Shimizu ◽  
Hiraku Matsukuma ◽  
Wei Gao

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.


2018 ◽  
Vol 12 (5) ◽  
pp. JAMDSM0096-JAMDSM0096 ◽  
Author(s):  
Yuki SHIMIZU ◽  
Shuhei MADOKORO ◽  
Hiraku MATSUKUMA ◽  
Wei GAO

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