A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer

An interferometric self-calibration method for the evaluation of the pitch deviation of scale grating has been extended to evaluate the pitch deviation of the long-range type linear scale by utilizing the stitching interferometry technique. Following the previous work, in which the interferometric self-calibration method was proposed to assess the pitch deviation of the scale grating by combing the first-order diffracted beams from the grating, a stitching calibration method is proposed to enlarge the measurement range. Theoretical analysis is performed to realize the X-directional pitch deviation calibration of the long-range linear scale while reducing the second-order accumulation effect by canceling the influence of the reference flat error in the sub-apertures’ measurements. In this paper, the stitching interferometry theory is briefly reviewed, and theoretical equations of the X-directional pitch deviation stitching are derived for evaluation of the pitch deviation of the long-range linear scale. Followed by the simulation verification, some experiments with a linear scale of 105 mm length from a commercial interferential scanning-type optical encoder are conducted to verify the feasibility of the self-calibration stitching method for the calibration of the X-directional pitch deviation of the linear scale over its whole area.

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Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer

Measurement Science and Technology ◽

10.1088/1361-6501/ab8b83 ◽

2020 ◽

Vol 31 (9) ◽

pp. 094002

Author(s):

Xin Xiong ◽

Hiraku Matsukuma ◽

Yuki Shimizu ◽

Wei Gao

Keyword(s):

Calibration Method ◽

Fizeau Interferometer ◽

Linear Scale ◽

Self Calibration ◽

Pitch Deviation

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Theoretical Study on Self-Calibration for the Wide-Range Laser Auto-Collimation Method

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.381-382.271 ◽

2008 ◽

Vol 381-382 ◽

pp. 271-274

Author(s):

Hiroki Shimizu ◽

Osamu Hayashi

Keyword(s):

Optical System ◽

Calibration Method ◽

Calibration Procedure ◽

Measurement Range ◽

Angle Sensor ◽

Specific Calculation ◽

Self Calibration ◽

Wide Range ◽

Before And After ◽

Steep Slopes

A wide-range laser auto-collimation method to measure the surface profiles of targets with steep slopes has been proposed. This method employs a deflecting optical system to enlarge the measurement range of the angle sensor. However, this optical system also changes the sensitivity property of the angle sensor. Therefore, we propose a new in-situ self-calibration method that includes the geometrical designed data of the target and can be applied to wide-range laser auto-collimation method. In the proposed method, the calibration sensitivities at each measurement point are obtained with two sets of measured data, which are acquired before and after performing minute rotation or translation with respect to the measured target, and the simulated shift of the normal angle at each point. The present paper describes the calibration procedure and specific calculation method used in the proposed method.

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Self-calibration Method and Pose Domain Determination of Light-Pen in a 3D Vision Coordinate Measurement System

10.20944/preprints202201.0054.v1 ◽

2022 ◽

Author(s):

Dongri Shan ◽

Chenglong Zhang ◽

Peng Zhang ◽

Xiaofang Wang ◽

Dongmei He ◽

...

Keyword(s):

Measurement System ◽

Absolute Error ◽

Calibration Method ◽

Measurement Range ◽

Experimental Results ◽

Auxiliary Equipment ◽

3D Vision ◽

Coordinate Measurement ◽

Self Calibration ◽

Light Pen

Light pen 3D vision coordinate measurement systems are increasingly widely used due to their advantages, such as small size, convenient carrying and wide applicability. The posture of the light pen is an important factor affecting accuracy. The pose domain of the pen needs to be given so that the measurement system has a suitable measurement range to obtain more qualified parameters. The advantage of the self-calibration method is that the entire self-calibration process can be completed at the measurement site without any auxiliary equipment. After the system camera calibration is completed, we take several pictures of the same measurement point with different poses to obtain the conversion matrix of the picture, and then use spherical fitting, the generalized inverse method of least squares, and the principle of position invariance within the pose domain range. The combined stylus tip center self-calibration method calculates the actual position of the light pen probe. The experimental results show that the absolute error is stable below 0.0737 mm and that the relative error is stable below 0.0025 mm. The experimental results verify the effectiveness of the method; the measurement accuracy of the system can meet the basic industrial measurement requirements.

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A Simple and Long-Range Displacement Measurement System

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.341-342.839 ◽

2013 ◽

Vol 341-342 ◽

pp. 839-842

Author(s):

Ye Hu ◽

Qian Hui Zhao ◽

Yong Ming Chen ◽

Lei Wang

Keyword(s):

Long Range ◽

Measurement System ◽

Simple Structure ◽

Measurement Range ◽

Displacement Measurement ◽

Linear Scale ◽

Simulation Experiments ◽

Repeatability Error ◽

Linearity Error ◽

Accuracy Performance

This paper introduces a well-used long range displacement measurement system. The advantages of the system are that the sensor's measurement range can be extended by optical linear scale with a simple structure, and the distance between the measured object and the sensor can be automatically adjusted. The feasibility of the measurement system is tested by simulation experiments, and the accuracy performance is evaluated with respect to both repeatability error and linearity error. The experimental results show that the displacement measurement system reaches a level of accuracy which is sufficient for operational requirements.

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A self-calibration method for gain and phase uncertainties based on one-dimension noise sub-space algorithm

JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT ◽

10.3724/sp.j.1187.2009.02058 ◽

2010 ◽

Vol 2009 (2) ◽

pp. 58-62 ◽

Cited By ~ 1

Author(s):

Zhiyu Zhou ◽

Hao Chen

Keyword(s):

Calibration Method ◽

One Dimension ◽

Self Calibration

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Influence of the Porosity of Polymer Foams on the Performances of Capacitive Flexible Pressure Sensors

Sensors ◽

10.3390/s19091968 ◽

2019 ◽

Vol 19 (9) ◽

pp. 1968 ◽

Cited By ~ 11

Author(s):

Sylvie Bilent ◽

Thi Hong Nhung Dinh ◽

Emile Martincic ◽

Pierre-Yves Joubert

Keyword(s):

Experimental Data ◽

Linear Model ◽

Dielectric Material ◽

Pressure Sensors ◽

Volume Ratio ◽

Measurement Range ◽

Polymer Foams ◽

First Order ◽

Non Linear ◽

Flexible Pressure Sensors

This paper reports on the study of microporous polydimethylsiloxane (PDMS) foams as a highly deformable dielectric material used in the composition of flexible capacitive pressure sensors dedicated to wearable use. A fabrication process allowing the porosity of the foams to be adjusted was proposed and the fabricated foams were characterized. Then, elementary capacitive pressure sensors (15 × 15 mm2 square shaped electrodes) were elaborated with fabricated foams (5 mm or 10 mm thick) and were electromechanically characterized. Since the sensor responses under load are strongly non-linear, a behavioral non-linear model (first order exponential) was proposed, adjusted to the experimental data, and used to objectively estimate the sensor performances in terms of sensitivity and measurement range. The main conclusions of this study are that the porosity of the PDMS foams can be adjusted through the sugar:PDMS volume ratio and the size of sugar crystals used to fabricate the foams. Additionally, the porosity of the foams significantly modified the sensor performances. Indeed, compared to bulk PDMS sensors of the same size, the sensitivity of porous PDMS sensors could be multiplied by a factor up to 100 (the sensitivity is 0.14 %.kPa−1 for a bulk PDMS sensor and up to 13.7 %.kPa−1 for a porous PDMS sensor of the same dimensions), while the measurement range was reduced from a factor of 2 to 3 (from 594 kPa for a bulk PDMS sensor down to between 255 and 177 kPa for a PDMS foam sensor of the same dimensions, according to the porosity). This study opens the way to the design and fabrication of wearable flexible pressure sensors with adjustable performances through the control of the porosity of the fabricated PDMS foams.

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