Development of a Process Data-based Strategy for Conditioning Position-controlled ID Cut-off Grinding Wheels in Silicon Wafer Manufacturing

Procedia Manufacturing ◽

10.1016/j.promfg.2017.07.349 ◽

2017 ◽

Vol 11 ◽

pp. 1984-1991

Author(s):

Uwe Teicher ◽

Wolfgang Dietz ◽

Andreas Nestler ◽

Alexander Brosius

Keyword(s):

Silicon Wafer ◽

Grinding Wheels ◽

Process Data ◽

Wafer Manufacturing

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CONTINUING TO OFFSET WATER USE IN SILICON WAFER MANUFACTURING – AN UPDATE

Proceedings of the Water Environment Federation ◽

10.2175/193864700785156235 ◽

2000 ◽

Vol 2000 (5) ◽

pp. 275-292

Author(s):

Alan E. Madewell. ◽

Paul S. Dickens

Keyword(s):

Silicon Wafer ◽

Water Use ◽

Wafer Manufacturing

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Separation and Recovery of Acid from Waste Acid Mixture in Silicon Wafer Manufacturing Industry.

KAGAKU KOGAKU RONBUNSHU ◽

10.1252/kakoronbunshu.28.339 ◽

2002 ◽

Vol 28 (3) ◽

pp. 339-344 ◽

Author(s):

Junji Shibata ◽

Masataka Morikawa ◽

Hideki Yamamoto

Keyword(s):

Silicon Wafer ◽

Manufacturing Industry ◽

Acid Mixture ◽

Wafer Manufacturing ◽

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Selected applications of photothermal and photoluminescence heterodyne techniques for process control in silicon wafer manufacturing

Optical Engineering ◽

10.1117/1.601216 ◽

1997 ◽

Vol 36 (2) ◽

pp. 446 ◽

Author(s):

Andreas Ehlert

Keyword(s):

Process Control ◽

Silicon Wafer ◽

Wafer Manufacturing

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Silicon wafer manufacturing process

Solar PV Power ◽

10.1016/b978-0-12-817626-9.00003-4 ◽

2021 ◽

pp. 53-70

Author(s):

Rabindra Satpathy ◽

Venkateswarlu Pamuru

Keyword(s):

Silicon Wafer ◽

Manufacturing Process ◽

Wafer Manufacturing

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Modeling and laboratory scale proof of concept of the horizontal ribbon growth process: Application to silicon wafer manufacturing

2012 38th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2012.6318155 ◽

2012 ◽

Author(s):

German A. Oliveros ◽

Ray Wang ◽

Sridhar Seetharaman ◽

B. Erik Ydstie

Keyword(s):

Silicon Wafer ◽

Growth Process ◽

Laboratory Scale ◽

Proof Of Concept ◽

Ribbon Growth ◽

Wafer Manufacturing

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Generalized Inference for Measuring Process Yield With the Contamination of Measurement Errors—Quality Control for Silicon Wafer Manufacturing Processes in the Semiconductor Industry

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2011.2181433 ◽

2012 ◽

Vol 25 (2) ◽

pp. 272-283 ◽

Author(s):

Chien-Wei Wu ◽

Mou-Yuan Liao

Keyword(s):

Quality Control ◽

Silicon Wafer ◽

Measurement Errors ◽

Semiconductor Industry ◽

Manufacturing Processes ◽

Measuring Process ◽

Process Yield ◽

Generalized Inference ◽

Wafer Manufacturing

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Application and Comparison of SPV and μPCD for Iron Measurement in Silicon Wafer Manufacturing

Recombination Lifetime Measurements in Silicon ◽

10.1520/stp15705s ◽

2009 ◽

pp. 199-199-7

Author(s):

Y Pan

Keyword(s):

Silicon Wafer ◽

Wafer Manufacturing

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Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Modern Aspects of Bulk Crystal and Thin Film Preparation ◽

10.5772/29816 ◽

2012 ◽

Author(s):

Lukas Valek ◽

Jan Sik

Keyword(s):

Crystal Growth ◽

Silicon Wafer ◽

Defect Engineering ◽

Czochralski Crystal Growth ◽

Wafer Manufacturing

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21413 The influence of wafer edge profile on polishing non-uniformity in silicon wafer manufacturing

The Proceedings of Conference of Kanto Branch ◽

10.1299/jsmekanto.2008.14.405 ◽

2008 ◽

Vol 2008.14 (0) ◽

pp. 405-406

Author(s):

Akira FUKUDA ◽

Tetsuo FUKUDA ◽

Hirokuni HIYAMA ◽

Manabu TSUJIMURA ◽

Toshiro DOI ◽

...

Keyword(s):

Silicon Wafer ◽

Edge Profile ◽

Wafer Manufacturing ◽

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Application of Gate Oxide Integrity Measurements in Silicon Wafer Manufacturing

Gate Dielectric Integrity: Material, Process, and Tool Qualification ◽

10.1520/stp13487s ◽

2008 ◽

pp. 102-102-10 ◽

Author(s):

MR Seacrist

Keyword(s):

Silicon Wafer ◽

Wafer Manufacturing ◽

Gate Oxide Integrity

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