This paper analyzes preventive maintenance scheduling of bottleneck equipment in a line concept of a wafer manufacturing line that has buffer in between equipment. After the start-up of the manufacturing, it has implemented time based maintenance and counter based maintenance without any fix sequence. The maintenance team will select in advance the date and time of the actual preventive maintenance to be perform and making sure all resources are planned. Then maintenance team implemented a Preventive Maintenance sequence which gives the lowest impact in production loss without sacrificing equipment’s quality and safety. This Preventive Maintenance Scheduling sequence is the best suitable method for manufacturing equipment that has buffer in between equipment which is arranged in a line concept. It has also been tested and proven in a wafer manufacturing industry.