Quantitative depth-profile analysis of transition metal nitride materials with combined grazing-incidence X-ray fluorescence and X-ray reflectometry analysis

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2020.105926 ◽

2020 ◽

Vol 171 ◽

pp. 105926

Author(s):

S. Torrengo ◽

D. Eichert ◽

Y. Mazel ◽

M. Bernard ◽

Y. Ménesguen ◽

...

Keyword(s):

Transition Metal ◽

Depth Profile ◽

Profile Analysis ◽

Grazing Incidence ◽

Depth Profile Analysis ◽

Metal Nitride ◽

X Ray ◽

Transition Metal Nitride

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An angle‐resolved, wavelength‐dispersive x‐ray fluorescence spectrometer for depth profile analysis of ion‐implanted semiconductors using synchrotron radiation

Review of Scientific Instruments ◽

10.1063/1.1143080 ◽

1992 ◽

Vol 63 (1) ◽

pp. 1194-1197 ◽

Author(s):

W. Schmitt ◽

J. Hormes ◽

U. Kuetgens ◽

W. H. Gries

Keyword(s):

Synchrotron Radiation ◽

Depth Profile ◽

Profile Analysis ◽

Depth Profile Analysis ◽

X Ray ◽

Fluorescence Spectrometer ◽

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A proposal of depth profile analysis method of strain distribution in surface layer using x-ray diffraction at small glancing angles of incidence

Journal of Physics Conference Series ◽

10.1088/1742-6596/83/1/012008 ◽

2007 ◽

Vol 83 ◽

pp. 012008 ◽

Author(s):

Yoshikazu Fujii ◽

Etsuya Yanase ◽

Kozi Nishio

Keyword(s):

Surface Layer ◽

Depth Profile ◽

Strain Distribution ◽

Profile Analysis ◽

Analysis Method ◽

X Ray Diffraction ◽

Depth Profile Analysis ◽

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Application of high-energy synchrotron-radiation X-ray photoelectron spectroscopy to the depth profile analysis of oxide layer on Si(100) surfaces.

BUNSEKI KAGAKU ◽

10.2116/bunsekikagaku.45.169 ◽

1996 ◽

Vol 45 (2) ◽

pp. 169-174 ◽

Author(s):

Hiroyuki YAMAMOTO ◽

Yuji BABA ◽

Teikichi A.SASAKI

Keyword(s):

Synchrotron Radiation ◽

Oxide Layer ◽

Depth Profile ◽

Photoelectron Spectroscopy ◽

Profile Analysis ◽

High Energy ◽

Depth Profile Analysis ◽

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Al capping layers for nondestructive x-ray photoelectron spectroscopy analyses of transition-metal nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4916239 ◽

2015 ◽

Vol 33 (5) ◽

pp. 05E101 ◽

Author(s):

Grzegorz Greczynski ◽

Ivan Petrov ◽

J. E. Greene ◽

Lars Hultman

Keyword(s):

Transition Metal ◽

Photoelectron Spectroscopy ◽

Metal Nitride ◽

X Ray ◽

Transition Metal Nitride

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Soft X-ray Emission Depth Profile Analysis: SXDA

Applied Surface Science ◽

10.1016/0169-4332(85)90211-9 ◽

1985 ◽

Vol 24 (1) ◽

pp. 34-56 ◽

Author(s):

A. Szász ◽

J. Kojnok

Keyword(s):

Depth Profile ◽

Profile Analysis ◽

Depth Profile Analysis ◽

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Non-destructive depth profile analysis for surface and buried interface of Ge thin film on Si substrate by high-energy synchrotron radiation x-ray photoelectron spectroscopy

Journal of Physics Conference Series ◽

10.1088/1742-6596/100/1/012044 ◽

2008 ◽

Vol 100 (1) ◽

pp. 012044 ◽

Author(s):

H Yamamoto ◽

Y Yamada ◽

M Sasase ◽

F Esaka

Keyword(s):

Thin Film ◽

Synchrotron Radiation ◽

Depth Profile ◽

Photoelectron Spectroscopy ◽

Profile Analysis ◽

High Energy ◽

Si Substrate ◽

Depth Profile Analysis ◽

X Ray ◽

Non Destructive

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X-Ray Photoelectron Spectroscopy Sputter Depth Profile Analysis of Spatially Controlled Microstructures in Conductive Polymer Films

Analytical Chemistry ◽

10.1021/ac00001a600 ◽

1991 ◽

Vol 63 (1) ◽

pp. 60-65 ◽

Author(s):

Susan G. MacKay ◽

Mohammad. Bakir ◽

Inga H. Musselman ◽

Thomas J. Meyer ◽

Richard W. Linton

Keyword(s):

Depth Profile ◽

Polymer Films ◽

Photoelectron Spectroscopy ◽

Profile Analysis ◽

Conductive Polymer ◽

Depth Profile Analysis ◽

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Influence of surface roughness in depth profile analysis of the strain distribution in surface layer using x-ray diffraction at small glancing angles of incidence

Transactions of the Materials Research Society of Japan ◽

10.14723/tmrsj.33.645 ◽

2008 ◽

Vol 33 (3) ◽

pp. 645-648

Author(s):

Yoshikazu Fujii

Keyword(s):

Surface Roughness ◽

Surface Layer ◽

Depth Profile ◽

Strain Distribution ◽

Profile Analysis ◽

X Ray Diffraction ◽

Depth Profile Analysis ◽

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Depth profile analysis of poly-crystalline layers structure and crystal grain size under surface using x-ray diffraction at small glancing angles of incidence

Journal of Physics Conference Series ◽

10.1088/1742-6596/83/1/012007 ◽

2007 ◽

Vol 83 ◽

pp. 012007

Author(s):

Yoshikazu Fujii ◽

Takenori Nakayama

Keyword(s):

Depth Profile ◽

Profile Analysis ◽

X Ray Diffraction ◽

Depth Profile Analysis ◽

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Depth Profile Analysis of Multilayer Ni-Fe Alloy Coatings by Glow Discharge Optical Emission Spectroscopy (GDOES) and Energy Dispersive X-ray (EDX) Linescan—a Comparative Study

Surface and Interface Analysis ◽

10.1002/(sici)1096-9918(199703)25:3<191::aid-sia218>3.0.co;2-b ◽

1997 ◽

Vol 25 (3) ◽

pp. 191-201 ◽

Author(s):

M. Ives ◽

D. B. Lewis ◽

C. Lehmberg

Keyword(s):

Glow Discharge ◽

Comparative Study ◽

Depth Profile ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Profile Analysis ◽

Optical Emission ◽

Energy Dispersive ◽

Depth Profile Analysis ◽

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