In Situ Mass Spectrometry Study on Atomic Layer Deposition from Metal (Ti, Ta, and Nb) Ethoxides and Water

2001 ◽  
Vol 13 (3) ◽  
pp. 817-823 ◽  
Author(s):  
Antti Rahtu ◽  
Kaupo Kukli ◽  
Mikko Ritala
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Mass Spectrometry Study

In Situ Quadrupole Mass Spectrometry Study of Atomic-Layer Deposition of ZrO2Using Cp2Zr(CH3)2and Water

Langmuir ◽  
2005 ◽  
Vol 21 (16) ◽  
pp. 7321-7325 ◽  
Author(s):  
Jaakko Niinistö ◽  
Antti Rahtu ◽  
Matti Putkonen ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition ◽  
Mass Spectrometry Study

Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry

2007 ◽  
Vol 201 (22-23) ◽  
pp. 9163-9171 ◽  
Author(s):  
David M. King ◽  
Joseph A. Spencer ◽  
Xinhua Liang ◽  
Luis F. Hakim ◽  
Alan W. Weimer
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Layer Deposition

Mass Spectrometry Study of the Temperature Dependence of Pt Film Growth by Atomic Layer Deposition

2012 ◽  
Vol 1 (6) ◽  
pp. P255-P262 ◽  
Author(s):  
I. J. M. Erkens ◽  
A. J. M. Mackus ◽  
H. C. M. Knoops ◽  
P. Smits ◽  
T. H. M. van de Ven ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Temperature Dependence ◽  
Film Growth ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Mass Spectrometry Study
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