Passivation of textured crystalline silicon with small pyramids by silicon nitride films formed by catalytic chemical vapor deposition and phosphorus catalytic impurity doping
2003 ◽
Vol 430
(1-2)
◽
pp. 100-103
◽
1997 ◽
Vol 36
(Part 1, No. 11)
◽
pp. 7035-7040
◽
2007 ◽
Vol 38
(1-2)
◽
pp. 148-151
◽
1990 ◽
Vol 29
(Part 1, No. 5)
◽
pp. 918-922
◽