Excimer Laser Annealing Effects of Silicon-rich Silicon Nitride Films Prepared by Using Catalytic Chemical Vapor Deposition
2003 ◽
Vol 430
(1-2)
◽
pp. 100-103
◽
1997 ◽
Vol 36
(Part 1, No. 11)
◽
pp. 7035-7040
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2004 ◽
2007 ◽
Vol 38
(1-2)
◽
pp. 148-151
◽