Effect of oxygen plasma treatment on low dielectric constant carbon-doped silicon oxide thin films
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2003 ◽
Vol 6
(1)
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pp. F1
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Keyword(s):
2005 ◽
Vol 5
(4)
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pp. 550-557
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2006 ◽
Vol 15
(1)
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pp. 133-137
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2005 ◽
Vol 152
(12)
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pp. C838
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2013 ◽
Vol 15
(1)
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pp. 86-88
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2001 ◽
Vol 71
(2)
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pp. 125-130
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