A method to derivatize surface silanol groups to Si-alkyl groups in carbon-doped silicon oxides
Keyword(s):
A carbon-doped silicon oxide (CDO) finds use as a material with a low dielectric constant (k) for copper interconnects in multilayered integrated circuits (ICs).
2003 ◽
Vol 6
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pp. F1
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2005 ◽
Vol 5
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pp. 550-557
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2006 ◽
Vol 15
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pp. 133-137
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2005 ◽
Vol 152
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pp. C838
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2002 ◽
Vol 19
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pp. 875-877
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2001 ◽
Vol 71
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pp. 125-130
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