An electron microscopy study of wear in polysilicon microelectromechanical systems in ambient air
1992 ◽
Vol 50
(2)
◽
pp. 1114-1115
1990 ◽
Vol 48
(4)
◽
pp. 50-51
2002 ◽
Vol 82
(4)
◽
pp. 735-749
◽
2003 ◽
Vol 112
◽
pp. 615-618
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Keyword(s):
1988 ◽
Vol 49
(C8)
◽
pp. C8-1979-C8-1980
Keyword(s):
2014 ◽
Vol 48
◽
pp. 57-65
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