Formation of microcrystalline silicon films using rapid crystal aluminum induced crystallization under low-temperature rapid thermal annealing
2012 ◽
Vol 50
(8)
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pp. 557-562
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2015 ◽
Vol 66
(6)
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pp. 1001-1008
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Titanium–silicon and silicon dioxide reactions controlled by low temperature rapid thermal annealing
1986 ◽
Vol 4
(3)
◽
pp. 993-997
◽