Formation of microcrystalline silicon films using rapid crystal aluminum induced crystallization under low-temperature rapid thermal annealing

2010 ◽  
Vol 518 (23) ◽  
pp. 6966-6971 ◽  
Author(s):  
Cheng-Chang Peng ◽  
Chen-Kuei Chung ◽  
Jen-Fin Lin
APL Materials ◽  
2013 ◽  
Vol 1 (3) ◽  
pp. 032117 ◽  
Author(s):  
M. Mizuguchi ◽  
T. Sakurada ◽  
T. Y. Tashiro ◽  
K. Sato ◽  
T. J. Konno ◽  
...  

1989 ◽  
Vol 65 (5) ◽  
pp. 2069-2072 ◽  
Author(s):  
R. Kakkad ◽  
J. Smith ◽  
W. S. Lau ◽  
S. J. Fonash ◽  
R. Kerns

1985 ◽  
Vol 47 (10) ◽  
pp. 1080-1082 ◽  
Author(s):  
L. J. Brillson ◽  
M. L. Slade ◽  
H. W. Richter ◽  
H. Vander Plas ◽  
R. T. Fulks

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