High performance self-aligned top-gate ZnO thin film transistors using sputtered Al2O3 gate dielectric

Thin Solid Films ◽

10.1016/j.tsf.2012.06.066 ◽

2012 ◽

Vol 520 (21) ◽

pp. 6681-6683 ◽

Author(s):

Rongsheng Chen ◽

Wei Zhou ◽

Meng Zhang ◽

Hoi Sing Kwok

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

Zno Thin Film ◽

Al2o3 Gate Dielectric

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High-performance ZnO thin film transistors with sputtering SiO2/Ta2O5/SiO2 multilayer gate dielectric

Thin Solid Films ◽

10.1016/j.tsf.2010.06.017 ◽

2010 ◽

Vol 518 (21) ◽

pp. 6130-6133 ◽

Author(s):

L. Zhang ◽

J. Li ◽

X.W. Zhang ◽

X.Y. Jiang ◽

Z.L. Zhang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

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Development of ZnO Thin Film Transistors Based on SiN/Al2O3 Gate Dielectric Materials

Journal of the Korean Physical Society ◽

10.3938/jkps.58.487 ◽

2011 ◽

Vol 58 (3) ◽

pp. 487-491 ◽

Author(s):

Eui-Jung Yun ◽

Young-Wook Song ◽

Hyoung G. Nam ◽

Nam-Ihn Cho ◽

Myunghee Jung

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Gate Dielectric ◽

Dielectric Materials ◽

Zno Thin Film ◽

Al2o3 Gate Dielectric

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P‐1.8: High Performance ZnO Thin Film Transistors on Flexible Substrate with Process Temperature No More Than 100 °C

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.14512 ◽

2021 ◽

Vol 52 (S1) ◽

pp. 435-435

Author(s):

Junchen Dong ◽

Qi Li ◽

Dedong Han ◽

Yi Wang ◽

Xing Zhang

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Flexible Substrate ◽

Process Temperature ◽

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High Field-Effect Mobility Bottom-Gated Metallorganic Chemical Vapor Deposition ZnO Thin-Film Transistors with SiO[sub 2]∕Si[sub 3]N[sub 4] Bilayer Gate Dielectric

Journal of The Electrochemical Society ◽

10.1149/1.3499348 ◽

2010 ◽

Vol 157 (12) ◽

pp. H1110 ◽

Author(s):

K. Remashan ◽

Y. S. Choi ◽

S. J. Park ◽

J. H. Jang

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Thin Film Transistors ◽

Field Effect ◽

Gate Dielectric ◽

Chemical Vapor ◽

Zno Thin Film ◽

Field Effect Mobility

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Hot Carrier Stress Investigation of Zinc Oxide Thin Film Transistors with an Al2O3 Gate Dielectric

2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) ◽

10.1109/ipfa.2018.8452171 ◽

2018 ◽

Author(s):

Rodolfo A. Rodriguez-Davila ◽

Israel Mejia ◽

Manuel Quevedo-Lopez ◽

Chadwin D. Young

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Gate Dielectric ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Hot Carrier ◽

Hot Carrier Stress ◽

Al2o3 Gate Dielectric

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Sol-gel derived Hf- and Mg-doped high-performance ZnO thin film transistors

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2017.05.266 ◽

2017 ◽

Vol 720 ◽

pp. 230-238 ◽

Author(s):

Manoj Kumar ◽

Hakyung Jeong ◽

Dongjin Lee

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Sol Gel ◽

Zno Thin Film ◽

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High-Performance ALD Al-Doped ZnO Thin-Film Transistors Grown on Flexible Substrates

IEEE Electron Device Letters ◽

10.1109/led.2019.2890831 ◽

2019 ◽

Vol 40 (2) ◽

pp. 240-242

Author(s):

Ayman Rezk ◽

Irfan Saadat

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Flexible Substrates ◽

Zno Thin Film ◽

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Superconcentrated aqueous electrolyte and UV curable polymer composite as gate dielectric for high-performance oxide semiconductor thin-film transistors

Applied Physics Letters ◽

10.1063/1.5093741 ◽

2019 ◽

Vol 114 (17) ◽

pp. 172903 ◽

Author(s):

Eun Goo Lee ◽

Jintaek Park ◽

Sung-Eun Lee ◽

Junhee Lee ◽

Changik Im ◽

...

Keyword(s):

Thin Film ◽

Polymer Composite ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

Aqueous Electrolyte ◽

Oxide Semiconductor ◽

Semiconductor Thin Film

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Analyzing and Increasing Yield of ZnO Thin-Film Transistors for Large-area Sensing Systems by Preventing Process-Induced Gate Dielectric Breakdown

2019 Device Research Conference (DRC) ◽

10.1109/drc46940.2019.9046406 ◽

2019 ◽

Author(s):

Zhiwu Zheng ◽

Levent E. Aygun ◽

Yoni Mehlman ◽

Sigurd Wagner ◽

Naveen Verma ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Gate Dielectric ◽

Dielectric Breakdown ◽

Zno Thin Film ◽

Sensing Systems

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High Performance Organic Thin Film Transistors Using Pentacene-Based Rare-Earth Oxide Bilayer Gate Dielectric

Journal of Electronic Materials ◽

10.1007/s11664-019-07232-4 ◽

2019 ◽

Vol 48 (7) ◽

pp. 4491-4497 ◽

Author(s):

Sagarika Khound ◽

Ranjit Sarma

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

Rare Earth Oxide ◽

Organic Thin Film Transistors ◽

Organic Thin Film

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