A study of optical properties of hydrogenated microcrystalline silicon films prepared by plasma enhanced chemical vapor deposition technique at different conditions of excited power and pressure

Vacuum ◽  
2009 ◽  
Vol 83 (7) ◽  
pp. 1023-1030 ◽  
Author(s):  
R.I. Badran ◽  
F.S. Al-Hazmi ◽  
S. Al-Heniti ◽  
A.A. Al-Ghamdi ◽  
J. Li ◽  
...  
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